Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Ushio UMA-2003

Asset ID: 13755

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Ushio

UMA-2003

UV Cure System

Resist Processing Equipment

Equipment details:

Date of Manufacture: 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Model: UMA-2003-H120F-IM01

Process: 6500-35 GATE RESIST CURE


Tool config is based on original PO, please verify tool details at tool inspection


Basic System: UMA-2003-H120F UVC, Qty 1

Wafer Size: Capable of processing 300mm +/- 0.05mm (SEMI M28), 775 +/- 25um, notched wafers, Qty 1

Carrier: 2 FOUP, Qty 1(TDK TAS-300)

Interface: 2 FOUP (Continuous flow operation). With Semi compliant MENV and FIMS assemblies

Carrier ID: Bar code, Qty 2

Communications Protocol: HSMS, Qty 1

EMO: Display and Main Unit (including attached Mini-environment) have front and back EMO, LAMP POWERSUPPLY UNIT FRONT SIDE, Qty 4

Interlocks: Power Supply Unit and Mini-environment have panel (cover) interlocks. Open lamp house

Cable Lengths: 15 meter cables run between the main unit and the Lamp?Supply unit, Qty 1

Signal Tower: Red/Yellow/Green, Qty 1

CL plate: Hp on the CL plate(with vacuum), Qty 1

Detection sensor(port1,port2): The FOUP up and down a transmission sensor Installation, Qty1

LAMP POWER SUPPLY?UNIT: LAMP?POWER SUPPLY?UNIT

CHILLER?UNIT: Qty 1

ROBOT?Controller?Unit: Qty 1

Bulk Gas: CDA Peak Flow=280, Ave Flow=5.4, Static pressure0.5?0.6M??

Bulk Gas: N2?FLOW10?50????n, Static pressure0.5?0.6Mpa

Bulk Gas: Vacuum?-80???,Flow?40L/Min

Electric: 200V±10V? 3PH 50/60Hz?175A? for Tool

Electric: 200V±10V? 3PH 50/60Hz?33A? for Chiller Unit

Water supply: Temperature?10?25? Flow? 6L/Min(over) Pressure?0.5?0.6Mpa for tools

Water supply: Temperature?25?(following), Flow?60L/Min(over), Pressure?.1Mpa(over)for Chiller unit

Exhaust: 6m3/min

Lamp cooling?20m3/min

Lamp power supply Exhaust?7m3/min Qty 3


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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