Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Ebara FREX300S Tungsten

Asset ID: 209803

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Ebara

FREX300S Tungsten

Tungsten CMP

CMP Equipment

Equipment details:

Date of Manufacture: 3/2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Software Version (include revision #) Ver. 11.50  
System Power Rating  208 AC 3-Phase   
Loading Configuration  3 load port  
   Vendor Chm ModelChemicals / Gases Used  
Chm/Unit Position   1  Polish unit slurry Slurry W7300 
Chm/Unit Position   2  Cleaner 1 unitTMAH 0.063% 
Chm/Unit Position   3  Cleaner 2 unitHF 100:1 
Chm/Unit Position   4  Cleaner 3 unitTMAH 0.063% 
Process Unit:  Model:Remark 
      
Controller:     
PLC  Mitsubishi
Q25HCPU/Q17HCPU/Q172CPU
 8
Robot Dry  U-RCM9120+XU-ACL4150YASUKAWA1
Robot Wet  U-RSM53D0YASUKAWA1
ME-10/20   Ver. 2.3.2.1.0EBARA End Point system1
Option chemical  surpass & advance & SMC EBARA cleaner second Chemical line1
MFC/Pressure Unit:     
REGULATOR (Roller pressure)  EV2509-108-FL312697CKD6
E/P REGULATOR (DR pressure)  ITV2020-02-4-X215SMC4
E/P REGULATOR (TR pressure)  ITV2030SMC4
VACUUM REGULATOR  IRV1000-01BGSMC4
      
      
Drive Mechanisms:     
TR Rotation driver  MR-J2S-350BMitsubishi4
TR Swing driver  MR-J2S-200BMitsubishi4
Dr rotation driver  MR-J2S-10BMitsubishi4
Dr swing driver  MR-J2-03B5Mitsubishi4
Turn table driver  SGDH-1AAE-Y291YASUKAWA4
Cleaner roller rotation driver  SGDS-01A32AYASUKAWA6
Cleaner stage rotation driver  SGDS-01A32AYASUKAWA6
CLTP X&Z axis driver  SGDS-02A32AYASUKAWA2
S/D rotation driver  SGDS-10A32AYASUKAWA1
      
FOUP Opener:     
ISOPORT   ASYST3
Gas System:     
      
Exhuast System:     


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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