P.S.K. Tech Inc. Supra V

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Process: Asher strip 

Software Version: 1.63 

System Power Rating: 208V 3-Phase 

Loading Configuration: 3 load position

Chm/Unit Position 1: 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2/NH3

Chm/Unit Position 1: 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2/NH3

Chm/Unit Position 1: 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2/NH3

Process chamber : Supra V- Qty 3

EFEM module: Supra V- Qty 1

TM module: Supra V- Qty 1

AC power box: Supra V- Qty 2

TM Robot: SANKYO- Qty 1

TM ROBOT control: SANKYO- Qty 1

EFEM Robot: SANKYO- Qty 1

MFC Gas 1 (O2-20SLM): STEC- Qty 3

MFC Gas 2 (N2-3SLM): STEC- Qty 3

MFC Gas 2 (H2/N2-5SLM): STEC- Qty 3

APC(valve + control): MKS- Qty 3

BARATRON Gauge: MKS- Qty 3

Pressure Transducer (Pirani): MKS- Qty 3

EPD Controller: NANOTEK- Qty 6

Heater Module: WATLOW- Qty 6

PICP: LANDMARK- Qty 6

LCD Monitor: JINYOUNG- Qty 2

1.Main Body

1-1 Load Port: Fixed Buffer

1-2 Number of load port: 3 Load ports

1-3 System wide corrosion free: Yes(SUS304)

2.Chamber

2-1 Bottom Temp Control: ±5℃(in wafer)

2-2 End Point Detector: Yes

2-3 Chamber Heating Control Type: P.I.D

2-4 Temp Control Range: 80℃∼300℃

2-5 Pre-Heat Function: Yes(ISBP)

2-6 PICP Generator Maker: LANDMARK

2-7 PCIP Max Power: 3KW

3.System Controller

3-1 CPU: Pentium 4

3-2 Hard disk: 80GB

3-3 1st data back-up: External Hard Disk Drive

3-4 2nd data back-up: CD-RW

3-5 Operation Monitor: 15" LCD

3-6 Signal Tower: Pole type

4.Process Gas Line

4-1 MFC Maker: STEC

4-2 GAS Box Tupe: IGS Type

4-3 Number of gas Line: 

   GAS #1: O2 20slm

   GAS #2: N2 3slm

   GAS #4: H2N2 5slm

4-4 Purity: 10RA

4-5 MFC Signal: Digital(UFC8161)

4-6 Toxic Gas Handle Valve Install: Yes

4-7 Gas Line Polishing: Electrical Polished

4-8 Regulator: PARKER

4-9 Air Operated Valve: Fujikin

4-10 Filter: Millipore

4-11 Pressure Transducer: Tem Tech

5.Vacuum 

5-1 Pressure Control: Throttle Valve

5-3 Vac Line Out Let Port: 100

6.Utility

6-1 Main Power: 3 208VAC 60HZ 288A

6-2 UPS Power: 1 208VAC 60HZ 63A

6-3 Power Vaccine: 1sec pffd

6-4 Electric&signal cable Length: 20M

6-5 UPS Battery: YES

6-6 Circuit Break Type: ELCB Type

6-7 Water Manifold valve: Swg & Shut off v/v

Damage/Missing parts list

Missing- PM1 PMC controller Qty 1

Damage- PM2 gas5 MFC regulator Qty 1

Damage-PM2 gas6 MFC regulator Qty 1

Missing- PM1 EMO switch Qty 1

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales