Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: 05 / 07
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 7/20/2022
BLOCK DIAGRAM & PHOTOS AVAILABLE.
Fab15 will provide with shipping kits for equipment removal.
TRACK CONFIG 1:
COT cup:2
Developper cup:3
TRACK CONFIG 2:
Resist Reduction:RRC
Dev Nozzle:SH Nozzle
Resist pump:RDS(10ml)×2
CRD×6
Oven Config:
COT:CLHP x3
PEB:CLHP ×4
Post bake:LHP x4
TAD×2
Track Chemicals:
Resist supply:Gallon bottle
Thinner:OK73
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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