Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Endura II Copper Barrier/Seed

Asset ID: 15872

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Applied Materials (AMAT)

Endura II Copper Barrier/Seed

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 7/30/2021

Tool config is based on original PO, please verify tool details at tool inspection


Chamber Position 1 & 3 - Process Type SIP Ti

Chamber Position c & D - Process Type Reactive PC

Chamber Position 2 - EnCoReII Ta

Chamber Position 4 - EnCoReII Cu


Process Type: SIP Ti

Chamber position: 1,3

Shutter option: yes

chamber body (Al or SST): SST

chamber body part number: 0242-33289

Slit valve seal (bonded or o-ring): Bonded

Slit Valve door part number: 0040-84391

Target vendor: Nikko/Tosoh

Target No.: TAG73

Bakeout/idle power (%): 40

E-Mag Power Supply: n/a

E-Mag Supply Vendor/Type: n/a

OEM Part Number: n/a

DC Power supply(AE-MDX????): AE-Pinnacle

AMAT Part number Master: 0190-34650

OEM Part Number Master: n/a

AMAT Part number Slave: 0190-34650

OEM Part Number Slave: n/a

Generator Size : 20kw

Total DC (12 kwh,24kwh, etc): 40kw

Bias Generator : ENI - GHW12Z

AMAT Part number : 0190-25529

OEM Part Number: GHW-12Z-12DF2NH-001

Bias Generator Size: 1250w

Bias Generator Frequency: 13.56 Mhz

Rf coil generator: n/a

AMAT Part number : n/a

OEM Part Number: n/a

RF1 power cable P/N (bias): 0190-02031

RF2 power cable P/N (resonator): n/a

RF cable (match bax to PIB): 0190-15905

Magnet rotation speed (rpm): 65

Magnet shim thickness: n/a

Magnet type: SIP

Magnet part number: 0010-11228

Magnet Serial Number (man. Date): no need

Target to magnet spacing(mm): 1.5mm

adaptor p/n: 0040-82921

Kit spacer upper p/n: 0040-76943

Kit spacer lower p/n: 0040-62877

upper shield p/n: 0020-23549

Treatment (Arc spray/Bead Blast): Arc Spray

Treatment roughness (RA): na

lower shield p/n: 0020-02344

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): na

inner(or mid) shield p/n: 0020-54777

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): na

shield clamp p/n: na

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

inner(or mid) shield clamp p/n: 0020-08299

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): na

lower shield clamp p/n: 0020-02348

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): na

pedestal cover p/n: na

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

dep ring p/n: 0200-08301

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

cover ring p/n: 0021-17770

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): na

insulator bushing p/n: 0200-00590

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

Shutter: 0021-25014

Treatment (Arc spray/Bead Blast): Bead Blast

Treatment roughness (RA): na

pedestal type: FDR SLT

pedestal p/n: 0010-22985

heater spacing in mm: no concern

heater spacing in steps: -55050

min heater spacing in mm: no concern

min heater spacing in steps: no concern

max heater spacing in mm: no concern

max heater spacing in steps: no concern

Lift fingers p/n: no concern

Lift hoop p/n: no concern

Cryo restrictor(Y/N): na

Cryo restrictor Part Number: na

Max Cryo regen gas load (L): 400

Cryo gate valve (2/3 pos): 3 Position

MFC 1 Gas: N2

MFC 1 Cal Factor: .

MFC 1 Size: 100

MFC 1 Type: na

MFC 1 Part Number: na

MFC 2 Gas: na

MFC 2 Cal Factor: na

MFC 2 Size: na

MFC 2 Type: na

MFC 2 Part Number: na

MFC 3 Gas: Ar

MFC 3 Cal Factor: na

MFC 3 Size: 50

MFC 3 Type: na

MFC 3 Part Number: na

MFC 4 Gas: ArH

MFC 4 Cal Factor: na

MFC 4 Size: 20

MFC 4 Type: na

MFC 4 Part Number: na

Chamber base pressure (T): 2.0 e-8

Chamber Rate-of-Rise(nTorr/min): 522

Press. and ROR at Startup: no concern

Pressure Rise 1 min: no concern

Pressure Rise 5 min: no concern

Pressure Rise 10 min: no concern

Pressure vs. Gas Flow table: no concern

Process Ar Supply Pressure: 30

Process N2 Supply Pressure: 30

Cryo Regen N2 pressure: 90

Vent Ar pressure: 40

Optional Gas (He): na

O2 (Ch. F): na

H2(Ch. E): na

H2(Ch. C): na

CDA: 88

SLIT VALVE CDA: 82

Cooling Water Flow (GPM): 8.9


Process Type: Reactive PC

Chamber position: C/D

Shutter option: none

chamber body (Al or SST): Al

chamber body part number: 0040-76718

Slit valve seal (bonded or o-ring): Bonded

Slit Valve door part number: 0040-84391

Target vendor: n/a

Target No.: n/a

Bakeout/idle power (%): n/a

E-Mag Power Supply: n/a

E-Mag Supply Vendor/Type: n/a

OEM Part Number: n/a

DC Power supply(AE-MDX????): n/a

AMAT Part number Master: n/a

OEM Part Number Master: n/a

AMAT Part number Slave: n/a

OEM Part Number Slave: n/a

Generator Size : n/a

Total DC (12 kwh,24kwh, etc): n/a

Bias Generator : n/a

AMAT Part number : n/a

OEM Part Number: n/a

Bias Generator Size: n/a

Bias Generator Frequency: 13.56MHz / 2MHz (in one generator)

Rf coil generator: COMDEL CDX-2000

AMAT Part number : 0190-23308

OEM Part Number: n/a

RF1 power cable P/N (bias): 0190-01458

RF2 power cable P/N (resonator): 0190-04657

RF cable (match bax to PIB): 0150-22371 (Cobalt/reflow)

Magnet rotation speed (rpm): n/a

Magnet shim thickness: n/a

Magnet type: n/a

Magnet part number: n/a

Magnet Serial Number (man. Date): no need

Target to magnet spacing(mm): n/a

adaptor p/n: n/a

Kit spacer upper p/n: n/a

Kit spacer lower p/n: n/a

upper shield p/n: Belljar 0040-55456

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

lower shield p/n: 0040-86514

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

inner(or mid) shield p/n: 0021-19342

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

shield clamp p/n: Pedestal 0020-19258

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

inner(or mid) shield clamp p/n: Insulator 0020-01903

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

lower shield clamp p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

pedestal cover p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

dep ring p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

cover ring p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

insulator bushing p/n: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

Shutter: n/a

Treatment (Arc spray/Bead Blast): n/a

Treatment roughness (RA): n/a

pedestal type: n/a

pedestal p/n: n/a

heater spacing in mm: n/a

heater spacing in steps: n/a

min heater spacing in mm: n/a

min heater spacing in steps: n/a

max heater spacing in mm: n/a

max heater spacing in steps: n/a

Lift fingers p/n: n/a

Lift hoop p/n: n/a

Cryo restrictor(Y/N): n/a

Cryo restrictor Part Number: n/a

Max Cryo regen gas load (L): n/a

Cryo gate valve (2/3 pos): Pendulum

MFC 1 Gas: He

MFC 1 Cal Factor: 1

MFC 1 Size: 300

MFC 1 Type: He

MFC 1 Part Number: 0010-42845

MFC 2 Gas: Ar2

MFC 2 Cal Factor: 1

MFC 2 Size: 200

MFC 2 Type: Ar

MFC 2 Part Number: 0010-42857

MFC 3 Gas: Ar

MFC 3 Cal Factor: 1

MFC 3 Size: 20

MFC 3 Type: Ar

MFC 3 Part Number: 0010-42843

MFC 4 Gas: (MFC6) H2

MFC 4 Cal Factor: (MFC6) 1

MFC 4 Size: (MFC6) 100

MFC 4 Type: (MFC6) H2

MFC 4 Part Number: (MFC6) 0010-42861

Chamber base pressure (T): 0.0000002

Chamber Rate-of-Rise(nTorr/min): 15000

Press. and ROR at Startup: not necessary

Pressure Rise 1 min: not necessary

Pressure Rise 5 min: not necessary

Pressure Rise 10 min: not necessary

Pressure vs. Gas Flow table: not necessary

Process Ar Supply Pressure: 34.7

Process N2 Supply Pressure: 33.9

Cryo Regen N2 pressure: 100

Vent Ar pressure: 47.7

Optional Gas (He): 30.1

O2 (Ch. F): n/a

H2(Ch. E): n/a

H2(Ch. C): n/a

CDA: 95.7

SLIT VALVE CDA: 85

Cooling Water Flow (GPM): 0.8


Process Type: EnCoReII Ta

Chamber position: 2

Shutter option: yes

chamber body (Al or SST): SST

"chamber body part number: 0040-81737

0040-99334

0040-77918

0040-98657"

Slit valve seal (bonded or o-ring): Bonded

Slit Valve door part number: 0040-84391

Target vendor: Nikko

Target No.: TAG124

Bakeout/idle power (%): 0

E-Mag Power Supply: 0195-03305

E-Mag Supply Vendor/Type: Kollmorgen

OEM Part Number: n/a

DC Power supply(AE-MDX????): AE-Pinnacle

AMAT Part number Master: 0190-24674

OEM Part Number Master: na

AMAT Part number Slave: 0190-24674

OEM Part Number Slave: n/a

Generator Size : 20kw

Total DC (12 kwh,24kwh, etc): 40kw

Bias Generator : ENI - GHW12Z

AMAT Part number : 0190-25530

OEM Part Number: GHW-12Z-12DF2NH-001

Bias Generator Size: 1250w

Bias Generator Frequency: 13.56 Mhz

Rf coil generator: n/a

AMAT Part number : n/a

OEM Part Number: n/a

RF1 power cable P/N (bias): 

RF2 power cable P/N (resonator): n/a

RF cable (match bax to PIB): 

Magnet rotation speed (rpm): 65

Magnet shim thickness: n/a

Magnet type: 

Magnet part number: 

Magnet Serial Number (man. Date): no need

Target to magnet spacing(mm): 1.5mm

adaptor p/n: see chamber body

Kit spacer upper p/n: see chamber body

Kit spacer lower p/n: see chamber body

upper shield p/n: 0020-23549

Treatment (Arc spray/Bead Blast): Arc Spray

Treatment roughness (RA): na

lower shield p/n: 0020-44976

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

inner(or mid) shield p/n: 0020-99268

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

shield clamp p/n: na

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

inner(or mid) shield clamp p/n: na

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

lower shield clamp p/n: na

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

pedestal cover p/n: na

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

dep ring p/n: 0020-63125

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

cover ring p/n: 0020-63124

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

insulator bushing p/n: 0200-00590

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

Shutter: 0020-45231

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

pedestal type: Falcon ESC

pedestal p/n: 0010-24456

heater spacing in mm: no concern

heater spacing in steps: -55050

min heater spacing in mm: no concern

min heater spacing in steps: no concern

max heater spacing in mm: no concern

max heater spacing in steps: no concern

Lift fingers p/n: no concern

Lift hoop p/n: no concern

Cryo restrictor(Y/N): na

Cryo restrictor Part Number: na

Max Cryo regen gas load (L): 400

Cryo gate valve (2/3 pos): 3 Position

MFC 1 Gas: N2

MFC 1 Cal Factor: .

MFC 1 Size: 92

MFC 1 Type: na

MFC 1 Part Number: na

MFC 2 Gas: na

MFC 2 Cal Factor: na

MFC 2 Size: na

MFC 2 Type: na

MFC 2 Part Number: CELERITY

MFC 3 Gas: Ar

MFC 3 Cal Factor: na

MFC 3 Size: 50

MFC 3 Type: na

MFC 3 Part Number: CELERITY

MFC 4 Gas: ArH

MFC 4 Cal Factor: na

MFC 4 Size: 20

MFC 4 Type: na

MFC 4 Part Number: CELERITY

Chamber base pressure (T): 2.0 e-8

Chamber Rate-of-Rise(nTorr/min): 522

Press. and ROR at Startup: no concern

Pressure Rise 1 min: no concern

Pressure Rise 5 min: no concern

Pressure Rise 10 min: no concern

Pressure vs. Gas Flow table: no concern

Process Ar Supply Pressure: 30

Process N2 Supply Pressure: 30

Cryo Regen N2 pressure: 90

Vent Ar pressure: 40

Optional Gas (He): na

O2 (Ch. F): na

H2(Ch. E): na

H2(Ch. C): na

CDA: 88

SLIT VALVE CDA: 82

Cooling Water Flow (GPM): 8.9


Process Type: EnCoReII Cu

Chamber position: 4

Shutter option: yes

chamber body (Al or SST): SST

"chamber body part number: 0040-64076

0040-90375

0090-04724

0040-76824"

Slit valve seal (bonded or o-ring): Bonded

Slit Valve door part number: 0040-84391

Target vendor: Nikko

Target No.: TAG131

Bakeout/idle power (%): 0

E-Mag Power Supply: n/a

E-Mag Supply Vendor/Type: n/a

OEM Part Number: n/a

DC Power supply(AE-MDX????): AE-Pinnacle

AMAT Part number Master: 0190-25692

OEM Part Number Master: n/a

AMAT Part number Slave: 0190-25692

OEM Part Number Slave: n/a

Generator Size : 20kw

Total DC (12 kwh,24kwh, etc): 40kw

Bias Generator : ENI - GHW12Z

AMAT Part number : 0190-25530

OEM Part Number: GHW-12Z-12DF2NH-001

Bias Generator Size: 1250w

Bias Generator Frequency: 13.56 Mhz

Rf coil generator: n/a

AMAT Part number : n/a

OEM Part Number: n/a

RF1 power cable P/N (bias): 

RF2 power cable P/N (resonator): n/a

RF cable (match bax to PIB): 

Magnet rotation speed (rpm): 65

Magnet shim thickness: n/a

Magnet type: 

Magnet part number: 

Magnet Serial Number (man. Date): no need

Target to magnet spacing(mm): 1.5mm

adaptor p/n: see chamber body

Kit spacer upper p/n: see chamber body

Kit spacer lower p/n: see chamber body

upper shield p/n: 0021-16781

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

lower shield p/n: 0020-85755

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

inner(or mid) shield p/n: 0020-83706

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

shield clamp p/n: na

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

inner(or mid) shield clamp p/n: 0020-26374

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

lower shield clamp p/n: 0020-02348

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

pedestal cover p/n: na

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

dep ring p/n: 0200-04017

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

cover ring p/n: 0021-16783

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

insulator bushing p/n: 0200-00590

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

Shutter: 0021-25014

Treatment (Arc spray/Bead Blast): na

Treatment roughness (RA): na

pedestal type: Falcon ESC

pedestal p/n: 0010-24456

heater spacing in mm: no concern

heater spacing in steps: -55050

min heater spacing in mm: no concern

min heater spacing in steps: no concern

max heater spacing in mm: no concern

max heater spacing in steps: no concern

Lift fingers p/n: no concern

Lift hoop p/n: no concern

Cryo restrictor(Y/N): na

Cryo restrictor Part Number: na

Max Cryo regen gas load (L): 400

Cryo gate valve (2/3 pos): 3 Position

MFC 1 Gas: na

MFC 1 Cal Factor: na

MFC 1 Size: na

MFC 1 Type: na

MFC 1 Part Number: na

MFC 2 Gas: Ar

MFC 2 Cal Factor: 1

MFC 2 Size: 200

MFC 2 Type: na

MFC 2 Part Number: CELERITY

MFC 3 Gas: Ar

MFC 3 Cal Factor: na

MFC 3 Size: 20

MFC 3 Type: na

MFC 3 Part Number: CELERITY

MFC 4 Gas: ArH

MFC 4 Cal Factor: na

MFC 4 Size: 20

MFC 4 Type: na

MFC 4 Part Number: CELERITY

Chamber base pressure (T): 2.0 e-8

Chamber Rate-of-Rise(nTorr/min): 522

Press. and ROR at Startup: no concern

Pressure Rise 1 min: no concern

Pressure Rise 5 min: no concern

Pressure Rise 10 min: no concern

Pressure vs. Gas Flow table: no concern

Process Ar Supply Pressure: 30

Process N2 Supply Pressure: 30

Cryo Regen N2 pressure: 90

Vent Ar pressure: 40

Optional Gas (He): na

O2 (Ch. F): na

H2(Ch. E): na

H2(Ch. C): na

CDA: 88

SLIT VALVE CDA: 82

Cooling Water Flow (GPM): 8.9


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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