Ebara FREX300S Poly/STI

Equipment details:

Date of Manufacture: 2007-02-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Software

HMI/ Human / Machine Interface :11.5

PLC 1/ Main PLC controller :7.22

PLC 2/ Load / Unload :7.73

PLC 3/ Transfer :7.77

PLC 4/ Cleaner Modules :10.4

PLC 5/ Polisher A :7.61

PLC 6/ Polisher B :7.61

PLC 7/ Polisher C :7.61

PLC 8/ Polisher D :7.61

PLC9/ Option chemical :7.04

ITM PC/ NOVA 3060 :7.07

ME-20/ ME-20 :none

NOVA Interface software/ Via File Server :none

Block Controller/ Incorporated into HMI PC. :10.5

Interface requirements

HMI USB Ports/ Capable of recipe/data storage and retrieval :HMI USB Ports

Factory Interface

Frame Configuration/ Metro ready right side of mini-environment :NONE

WIP Delivery Type/ OHT or manual delivery :OHT or manual

E84 PI O Sensors and Cables/ UPPER E84 Sensors & Cables, with E87 compliance :UPPER E84 Sensors & Cables

Load Port Types/ Semi Compliant MENV and FIMS Assmeblies :ASYST Iso port

Platen A

Platen Type/ Ceramic (SiC), 10-150 RPM :ceramic 10-150rpm

Platen End point/ RECM & Friction :NA

Slurry Delivery/ CLC delivery type :Asahi

Platen Cooling Flow Monitor/ Installed on the platen cooling return line. :yes

Platen Cooling Temp Monitor/ Temperature monitor installed on the platen cooling return line. :yes

Platen B

Platen Type/ Ceramic (SiC), 10-150 RPM :ceramic 10-150rpm

Platen End point/ RECM & Friction :NA

Slurry Delivery/ CLC delivery type :Asahi

Platen Cooling Flow Monitor/ Installed on the platen cooling return line. :yes

Platen Cooling Temp Monitor/ Temperature monitor installed on the platen cooling return line. :yes

Platen C

Platen Type/ Ceramic (SiC), 10-150 RPM :ceramic 10-150rpm

Platen End point/ RECM & Friction :NA

Slurry Delivery/ CLC delivery :Asahi

Platen Cooling Flow Monitor/ Installed on the platen cooling return line. :yes

Platen Cooling Temp Monitor/ Temperature monitor installed on the platen cooling return line. :yes

Platen D

Platen Type/ Ceramic (SiC), 10-150 RPM :ceramic 10-150rpm

Platen End point/ RECM & Friction :NA

Slurry Delivery/ CLC delivery type :Asahi

Platen Cooling Flow Monitor/ Installed on the platen cooling return line. :yes

Platen Cooling Temp Monitor/ Temperature monitor installed on the platen cooling return line. :yes

Polisher

Polishing Head/ 300mm AI Head Generation II :300MM AI Head Generation II

Pad Wafer Loss Sensor/ Laser type :Laser type

Atomizer/Spray Bar/ Ebara to provide bracket and atomizer bar. :Atomizer

Cleaner Module

Special Chemical/ Single chemical bulk line that will service all modules. :yes

Cleaner Module 1

Roll Roll Cleaner Type/ Roll Brush :Roll Brush

Chemical 1 Upper Control Valve/ CLC :CLC

Chemical 1 Lower Control Valve/ CLC :CLC

Chemical 1 Upper Flow Meter/ CLC :CLC

Chemical 1 Lower Flow Meter/ CLC :CLC

Special Chemical Upper/ Air operation valve :yes

Special Chemical Lower/ Air operation valve :yes

Special Chemical Upper/ Flow Meter with user configurable alarm settings. :yes

Special Chemical Lower/ Flow Meter with user configurable alarm settings. :yes

Megasonic/ Nozzle :Nozzle

Bevel Edge Cleaning/ Yes :yes

Cleaner Module 2

Roll Roll Cleaner Type/ Roll Brush :Roll Brush

Chemical 2 Upper Control Valve/ CLC :CLC

Chemical 2 Lower Control Valve/ CLC :CLC

Chemical 2 Upper Flow Meter/ CLC :CLC

Chemical 2 Lower Flow Meter/ CLC :CLC

Special Chemical Upper/ Air operation valve :yes

Special Chemical Lower/ Air operation valve :yes

Special Chemical Upper/ Flow Meter with user configurable alarm settings. :yes

Special Chemical Lower/ Flow Meter with user configurable alarm settings. :yes

Megasonic/ Nozzle :Nozzle

Bevel Edge Cleaning/ No :N/A

Cleaner Module 3

Roll Roll Cleaner Type/ Roll Brush :Roll Brush

Chemical 1 Upper Control Valve/ CLC :CLC

Chemical 1 Lower Control Valve/ CLC :CLC

Chemical 1 Upper Flow Meter/ CLC :CLC

Chemical 1 Lower Flow Meter/ CLC :CLC

Special Chemical Upper/ Air operation valve :yes

Special Chemical Lower/ Air operation valve :yes

Special Chemical Upper/ Flow Meter with user configurable alarm settings. :yes

Special Chemical Lower/ Flow Meter with user configurable alarm settings. :yes

Megasonic/ No :N/A

Bevel Edge Cleaning/ No :N/A

SRD

Spin Rinse Dryer/ Yes :yes

Facilities

Chemical Connection/ Bottom :Bottom

Exhaust Connection/ Top :Top

Gas Connection/ Bottom :Bottom

Drain Connection/ Bottom :Bottom

Chiller/ Communication interface :Communication interface

NOVA

Measurement/ NOVA_3060 :NOAV_3060

Damage/Missing parts list

Damage-COVER(1) Chemical box cover C-3112-003-0001: Qty 3

Damage-COVER(2) Utility box cover C-3112-002-0001: Qty 3

Damage-COVER　PLATE (CHB atomizer box) C-3537-973-0001: Qty 1

Damage-COVER　PLATE (CHC atomizer box) C-3537-973-0001: Qty 1

Damage-DIW GUN CASE (R SIDE) C-3131-165-0001: Qty 1

Damage-DIW GUN CASE (L SIDE) C-3131-110-0001: Qty 1

Damage-CHA&C Top ring cover Front cover (Upper) C-3111-816-0001: Qty 2

Damage-CHB&D Top ring cover Front cover (Upper) C-3111-975-0001: Qty 2

Damage-TT cover(A,C) C-3111-743-0001 SIDE COVER(1): Qty 2

Damage-TT cover(B,D) C-3111-744-0001 SIDE COVER(2): Qty 2

Damage-2F Cleaner CLTP Cover(Front), C-3112-033-0001, COVER(2): Qty 1

Damage-2F Cleaner CLTP Cover(Front), C-3112-034-0001, COVER(2L): Qty 1

Damage-2F Cleaner CLTP Cover(TOP), C-3112-038-0001, COVER(4): Qty 1

Damage-2F Cleaner CLTP Cover(TOP), C-3112-037-0001, COVER(4L): Qty 1

Damage-TOP RING ROTATION DRIVER: Qty 2

Damage-TOP RING SWING DRIVER: Qty 2

Damage-Cleaner chemical CLC: Qty 1

Damage-SGDS-01A32A C-5102-065-0001 : Qty 3

Damage-NOVA_3060: Qty 1

Missing IW GUN: Qty 4

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales