Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Reflexion

Asset ID: 54011

Print spec sheet

Applied Materials (AMAT)


Multi-Process CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Polisher Unit: Slurry flow control from pump type upgraded to CLC type

Section 1. Tool General Information 
Micron MISTI/LID #  AMRFB7B700
Vendor Tool Serial #  405584
Month / Year of Tool Move In  06/2004
Tool Availability Date  12/31/2019
Tool Current Status De-installed
Tool working condition  Working
Tool Location  Warehouse
Any modification/conversion/refrofit was perform to the tool? No
Section 2. Move-out constraint 
Any layout/move-out path constraint No
If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap.   
Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer.
Section 3. Tool Specific Information 
Tool Model  Reflexion
Process  Oxide
Sending Site Workstation Name  11-3AMAT_REF5Z_BPSG_01
Software Version (include revision #) rp3B6.5_31
System Power Rating  AC 208V 3-Phase
Loading Configuration  3 load port
Tool under OEM service contract?    No
Section 4. Missing / Defectiv e/ Cannibalized Parts
DescriptionMissing (Qty)
P1 door crack1 
Head cross assembly plug2 
FI chamber partitions screw10 
FI robot upper cover1 
Wet robot door cover screw6 
PC1 pneumatic box cover1 
PC2 pneumatic box cover1 
PC3 pneumatic box cover1 
P1 facility pneumatic box cover1 
Mega upper cover1 
BB1 upper cover1 
BB2 upper cover1 
SRD upper cover1 
BB1 motor pully and belt1 
P2 door key switch1 
H.D.D Remove (Micron Ruse ToolRule )3 

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