Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Centura AP AdvantEdge G5 Metal
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2/10
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Software Version (include revision #) AMS 2.8_82
System Power Rating 208VAC 3-Phase
Loading Configuration 2 Carrier Stage
Vendor Chm Model
Chm/Unit Position 1 Centura G5 BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43
Chm/Unit Position 2 Centura G5 BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43
Chm/Unit Position 3 Centura Asp CF4/O2/N2
Chm/Unit Position 4 Centura Asp CF4/O2/N2
Process Unit:Advantedge G5 Model:Centura Remark
Controller:
MFC/Pressure
Unit: MILLIPORE IntelliFlow(DeviceNet)
Drive Mechanisms:GUI PC
FOUP Opener: ADO
Gas System:Device Net
Exhuast System:TMP/Pump
Main AC Rack
Secondary AC Rack
IPUP
WFIB
Endpoint stand
Monitor stand
Side strage Left
Side strage Right
Main frame
DPS G5
Asp
FI
Fab15’s shipping kits have been installed on FI only. The Fab15 shipping kits are required to return to Fab15.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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