Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Centura AP AdvantEdge G5 Metal
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2/10
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
| Software Version (include revision #) | AMS 2.8_82 | ||||
| System Power Rating | 208VAC 3-Phase | ||||
| Loading Configuration | 2 Carrier Stage | ||||
| Vendor Chm Model | |||||
| Chm/Unit Position 1 | Centura G5 | 'BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43 | |||
| Chm/Unit Position 2 | Centura G5 | 'BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43 | |||
| Chm/Unit Position 3 | Centura Asp | CF4/O2/N2 | |||
| Chm/Unit Position 4 | Centura Asp | CF4/O2/N2 | |||
| Process Unit:Advantedge G5 | Model:Centura | Remark | |||
| Controller: | |||||
| MFC/Pressure Unit: MILLIPORE IntelliFlow(DeviceNet) | |||||
| Drive Mechanisms:GUI PC | |||||
| FOUP Opener: ADO | |||||
| Gas System:Device Net | |||||
| Exhuast System:TMP/Pump | |||||
| *All OEM cable connecting between FAB to SubFab are require to be list out (Include length in mm) | |||||
| Main AC Rack | |||||
| Secondary AC Rack | |||||
| IPUP | |||||
| WFIB | |||||
| Endpoint stand | |||||
| Monitor stand | |||||
| Side strage Left | |||||
| Side strage Right | |||||
| Main frame | |||||
| DPS G5 | |||||
| Asp | |||||
| FI | |||||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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