Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. Trias Ti/TiN

Asset ID: 205678

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Tokyo Electron Ltd.

Trias Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.

CONFIGURATION AVAILABLE: Please ask your sale person.

No PHOTOS provided: Please inspect to collect photos.


A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.


Insulating films were sublimated and the entire chambers were covered with it. But Fab did not get any dust made during the operation, and their productions were not affected at all.


Chemicals / Gases Used : TiCl4,NH3,N2,ClF3

Chamber : 4 ea

Other missing or damaged parts: Not reported.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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