Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Applied Materials (AMAT) Centura AP Ultima X Chamber Only

Asset ID: 209701

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Applied Materials (AMAT)

Centura AP Ultima X Chamber Only

HDP CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available


Inspect to confirm configuration and condition.

The Heater / PCB and RTF are missing.

The system not On-Line

Mainframe Type

Centura 4.0 Centura 4.0

Centura AP Centura AP

Chamber Process Applications:Position D D HDP_PSG

Chamber Types:Ultima X(HDP CVD)

The Load Ports is 3qty

Carrier ID Reader (E99)

WIP Delivery Type is OHT  

Atmospheric Robot Type is Other

Light Curtain Make/Model is OPTIMA

Gate Valve is Norcal

Turbo Pump Make/Model:SHIMAZDA3603

Turbo Throttle Valve (TTV) Drive: Direct 

Wafer Temp Monitoring

Dual Independent Helium Control is 10/10 TORR (std) and 10/20 TORR (high Bias)

Gas Ring Number of Ports is 0045-01133

Nozzle Type is 0040-11254

Top Baffle is 0010-02134

Process Kit is 0010-08948

Plasma Detect 

Clean Method is Astron RPS

Upper Chamber Type is Std

Chamber Position

Position D Top Mfgr.:13.65MHZ Model:10536

Position D Side Mfgr.1.8KHZ Model:10002

Position D Bias Mfgr.2.1KHZ Model:10002


Pumps Manufacturer is EDWARDS

Model is 1302

Quantity Required is 3 and included With System


The Mainframe and Load Lock Pump Manufacturer is EDWARDS

Model is IXL100 and included With System

Gas Delivery

Gas Line Input is Bottom Feed

Gas Delivery Type is SLD

Gas Panel Exhaust is Bottom

Gas Box Configuration

Gas Line #1 AR 500(sccm)

Gas Line #2 O2 500(sccm)

Gas Line #3 SIH4 500(sccm)

Gas Line #4 PH3 50(sccm)

Gas Line #5 N2 1000(sccm)

Gas Line #6 NF3 3000(sccm)

Gas Line #7 NH3 500(sccm)

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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