Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Novellus Systems Inc. SABRE

Asset ID: 209129

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Novellus Systems Inc.

SABRE

ECD (Electro Chemical Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 9-24-2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: 9/28/2023

Software Versionv 1.07b1
System Power Rating208 3 Phase
Loading Configuration3 LP
 Chamber DescriptionChamber Chemicals Gases
Chamber 1APT DuetH2O2
Chamber 4Plating DuetsCu Sulfate
Chamber 2EBR DuetsSulfuric Acid and Hydrogen Peroxide


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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