Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Edwards iH600

Asset ID: 214520

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Edwards

iH600

Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Qty-3- Not overhaul


ModuleS/NTool / Location
600-333037922340FAB B
600-333037978070FAB B
600-333037913297FAB B




Technical Data

Peak Speed600 m3h-1
353 cfm
10000 l min-1
Ultimate Vacuum7 x 10-4 mbar
5.3 x 10-4 Torr
0.07 Pa
Typical shaft seal nitrogen flow4 slm
Inlet ConnectionISO100
Outlet ConnectionNW40
Typical cooling water flow at 15 psi pressure drop240 l h-1
4 l min-1
Weight415 kg
Power input at ultimate3.4 kW
Rated motor power6.1 kW
Oil Capacity1.43 l


 

All figures are typical without gas ballast.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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