Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (Boise)
Date of Manufacture:
Currently Configured for: N/A
Current Equipment Status: Available
Location of Equipment: Boise, United States
Available date: Currently Available
Tool Status: Pump has been powered down, deinstalled, and moved to the warehouse.
Configuration: Audit to verify.
Pump has not been refurbished and has not been skidded or crated.
Technical data :
Nominal flow-rate (50/60 Hz) : 1136/1336 l/mn
Rotation speed : 3000/3600 rpm
Ultim. Pressure without nitrogen supply (50 Hz) maximale : 3.10-2 torr
Ultim. Pressure without nitrogen supply (60 Hz) maximale : 6.7 x 10-3 torr
Max. cont. inlet pressure : 50/38 mbar/torr
Max. exhaust pressure : 1200/900 mbar/torr
Motor power (total) : 1,5 kW
N2 flow rate range : 0 to 90000 sccm
Water flow : 30 to 100 l/h
Weight std version : 240/529 kg/lb
Weight mod. Version : 210/463 kg/lb
Ø Inlet/Exhaust port : 40/40 DN
Average noise level : < 70 dBA
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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