Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

LAM Research 2300e5 Exelan Flex EX

Asset ID: 209987

Print spec sheet

LAM Research

2300e5 Exelan Flex EX

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2010

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 10/7/2022

Missing or damaged parts status: Fab15 confirmed there are no missing or damaged parts.


OEM  LAM
Tool Model  Exelan FlexEX
Process  Oxide
Software Version (include revision #) 1.7.4_SP1-HF3-Release
System Power Rating  200 AC 3-Phase
Loading Configuration  3 load ports
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  FlexEXC4F8,CF4,O2,Ar,CO,CH3F,CHF3,Xe,C4F6,CH2F2,N2,COS
Chm/Unit Position   2  FlexEXC4F8,CF4,O2,Ar,CO,CH3F,CHF3,Xe,C4F6,CH2F2,N2,COS
Chm/Unit Position   3   __________________________________
Chm/Unit Position   4  FlexEXC4F8,CF4,O2,Ar,CO,CH3F,CHF3,Xe,C4F6,CH2F2,N2,COS
Chm/Unit Position   5  FlexEXC4F8,CF4,O2,Ar,CO,CH3F,CHF3,Xe,C4F6,CH2F2,N2,COS


Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.