Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. Tactras Vigus RK3 - Chamber Only

Asset ID: 205555

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Tokyo Electron Ltd.

Tactras Vigus RK3 - Chamber Only

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Hiroshima, Japan

Available date: Currently Available


(1 Chamber); Process OX. It has been removed from tool and is stored in clean room.

1 CHAMBER ONLY.

Tool ModelVigus RK3
ProcessOX
Software VersionVer5.35-Rev502-STD-5.35a
System Power Rating 200VAC 3-Phase 


Chm Position   1TACTRAS Vigus RK3Ar/H2/C4F8/O2/CF4/CHF3/CH2F2/CO/N2/C4F6/COS



CONFIGURATION AVAILABLE: Please ask your sale person.

No missing parts reported.

Shipping wheels will be needed for rigging out of clean room. Please inspect to confirm.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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