Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Tokyo Electron Ltd. (TEL) Telius 305 SCCM

Asset ID: 10209

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Tokyo Electron Ltd. (TEL)

Telius 305 SCCM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: Jun 11, 2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Software Version (include revision #) Ver6.75-Rev000-VSTD6.75a  
System Power Rating  200V AC 3-Phase  
Loading Configuration  3 lots loading  
   Vendor Chm ModelChemicals / Gases Used 
Chm/Unit Position   1  SCCMAr ,O2 ,CF4 ,CHF3 ,CH2F2 ,C4F6 ,C4F8 ,CO
Chm/Unit Position   2  SCCMAr ,O2 ,CF4 ,CHF3 ,CH2F2 ,C4F6 ,C4F8 ,CO
Chm/Unit Position   3  _________________________________________________________
Chm/Unit Position   4  _________________________________________________________
Process Unit:  Model:Remark 
Chiller  Daikin UBRPD5B-2T2
* stopped production
  
Coolant  Lower:FC3283, Upper:FC40  
Proc Chbr 1,2  SCCM Oxide; Y203 Coating  
ESC type  ESC ASSY,SCCM-OX LES3D87-052854-11
      
Controller:     
RF Generator TOP  AGA-50B2  
RF Matcher TOP  AMN-50B2  
RF Generator Bottom  WGA-50E  
Matching Controller  WMN-50H6(2MHZ/5KW)(PS3)  
      
MFC/Pressure Unit:     
Pressure Monitor  C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa 
Pressure Monitor  C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa 
Pressure Monitor  B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa
Pressure Monitor  ATM Switch : 41B13DGA2AA040 (MKS)  
Pressure Monitor  Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas 
      
Drive Mechanisms:     
      
FOUP Opener:     
Loader Module  SELME2112ZS22-AD5  
LOAD PORT  SELOP12F25-30U-14  
DRIVE UNIT  SBX92102928  
READER OPTICAL  ISS-1700-1TELCC  
Carrier ID Reader  KEYENCE BL-601 HAC1-SO  
      
Gas System:     
Final Pressure Switch  51A (MKS)  
Valve  Primary side(Utility-MFC):Mega mini (FUJIKIN)  
Valve  Secondary side(MFC-PC):Mega one (FUJIKIN)  
FCS  FCSDN-4WS-798  
      
Exhuast System:     
TMP  FT-3301
(MITSUBISHI)
  
TMP Back Pressure Monitor  51A11TGA2BA003 (MKS)  
Dry Pump  MU300(KASHIYAMA) Customer Supply  
Final Valve,  Heater  Valve; AGD21V-6RM-GWL4 (CKD)  
Filter  Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)  
APC  10 INCH (250MM)  
EMO  Front x1, Rear x3  
Signal Tower  Red/Yellow/Green/ (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)
Cable Length  12m (Interconnection), 16m (Top RF cables),15m(Btm RF cables) 
Coolant  Lower:FC3283, Upper:FC40  


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