Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Accretech/TSK UF3000EX

Asset ID: 210333

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Production Wafer Prober

Wafer Prober

Equipment details:

Date of Manufacture: 2008

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

External Chiller Unit: Yes

Loader Type: TSK

Number of Loaders: 2

Cassette ID Reader: Yes

Chuck Size: 12"

Chuck Top Material: NICKEL

Low Temp Chuck: YES

Chuck Temperature Range: -40~150℃

Temperature Unified Chuck Option: Type: ARTS-LC12

Low Noise Chuck Option: No

External Chiller Unit: ARTS-HS

High Force Z Drive: No

Auto Probe to Pad Alignment: Yes

Needle Mark Inspection: Yes

Fail Mark Inspection: Yes

Surface Wafer ID OCR: Yes

Wafer ID Barcode Reader: No

Needle Cleaning Option (Double Brush): No

Auto Needle Height and Align: Yes

Soak Time Option: Yes

Probe Card Changer: Yes

3-64 Multi-site Probing: 1~1024

GPIB Interface: Yes

RS232 Interface: Yes

RF Tag: No

Software Version: NA

Boot ROM Version: P/C unit no.: ACCT-072

User ID / Password: Default

Integrated Printer: No

Manipulator: MHF6000

Test System Interface: MICRON TESTER

Manual Set: No

Damage/Missing parts list

Please inspect tool to reconfirm

customer provided items not included on sales

UF3000EX Standard Feature

Overall Accuracy Within 2 µm

X,Y Stage Accuracy:±1.0µm

Stage Durability:200kgf

Wafer Size 8", 12"

X/Y axis Probing Area ±170 mm (X/Y axis Probing Area)

X/Y axis Maximum Speed X axis 300 mm/s Y axis 230 mm/s

Z axis Full Stroke 37 mm

Z axis Maximum Speed 30 mm/s

θ axis Rotation Range ±5 deg.

Fine Alignment CCD ITV Image Processing

Loader Cassette Mounts 1 (2nd cassette with option)

Loader Wafer Handling Robot Arm / Backside Holding

Hard Disk 3.5" 20GB (1 unit standard)

Floppy Disk 3.5" 2HD / 2DD (1 unit standard)

MO 230 / 540MB (1 unit standard)

Display 12.1" TFT Color LCD


Temp. Range:-40 to 150℃

Power Consumption Less than 2kVA

Air Supply Source Pressure 0.6 MPa or more

Air Supply Consumption Approximately 0.1 liters / wafer

Vacuum Supply Less than -80 kPa, 30 liters / minute

Dimensions 1508W × 1587D × 987 H mm

Weight 1500 kg (Standard)

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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