Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture: 2003
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: OXYNIT
Tool config is based on original PO, please verify tool details at tool inspection
Safety Specification S2-0200/ CE-Mark(STD)
Heater Model FTP VOS-56-003 4Zone / RT-1000(C ) /with RCU
Process Condition LP
Maximum Operating Temperature C 950
ART Control N/A
N2 Load Lock YES
Wafer Type 300mm-Si SEMI STD-Notch
Qty. of Production Wafers 100
Boat Operation (Handing Position) 2 Boat Type
Software Version (WAVES) Ver 2.13 (WAVES)
Dewpoint Meter for N2 Load Lock None
RCU Duct Length FNC - RCU N/A
Ionizer Maker / Model ION system / 4052e(controller):4610TF(ionizer)
Chemical Per-filter (for Acid) None
Chemical Per-filter (for Alkali) None
Chemical Per-filter (for Hydrocarbon) None
Side Maintenance None
O2 Density control for N2 Load Lock Yes
N2 Boat Shower Wafer Cooling Yes
Fumace Temperature Controller Model560A
Carrier Type FOUP/25slots SEMI STD
FOUP Maker / Model ASYST/GEN3
Carrier Stage Capacity 16
Info Pad A,B None
Info Pad C,D None
Fork Material 1+4/ AI2O3(STD)
W/T Type 1+4 Edge Grip
W/T Auto Teaching No
Furnace Exhaust Connection Point Top Connection
Cooling Water Connection Point Bottom Connection
RCU Duct Connection Point N/A
IGS Type IGS 1.5"W-seal rail-mount
IGS Maker Fujikin
Tubing Bends Bend (STD)
IGS Final Filter MYKROLIS(Ni)
IGS Regulator VERIFLO
IGS MFC Maker / Type AERA
IGS Press. Transducer NAGANO
Incoming Gas Connection Point Bottom Connection
Gas Vent Connection Point Bottom Connection
Exhaust Vent Connection Point Top Connection
Gas Unit Exh. Connection point Bottom Connection
Process Gas Exhaust connection point Bottom Connection
Vacuum Gage - Press Ctrl MYKROLIS
Vacuum Gage - Press Monitor (133kPa) MYKROLIS
Vacuum Gage - Pump Monitor MYKROLIS
Main Valve CKD Combination valve
Pump Maker / Model EDWARDS/IH1800 (30000L/min)
Pump Provided by Customer
Abatement System Type Buming Type
Abatement System Maker / Model OSC 1862WA (thermal wet)
Abatement System Provided by Customer
N2 Dilution Unit Provided by Gas cabinet exhaust
Pump Power Facility provide
Pump Control Unit Steeing Location
Pump-FNC Vacuum Piping Provided By Customer
Exhaust Pressure Control for AP Process N/A
Exhaust Pressure Control for AP Process Maker / Model N/A
Vacuum Exhaust System New Type
Trap Piping Trap
Vacuum Pressure Controller CKD-VEC
Burn Out Unit N/A
Condenser N/A
Outer/Inner Tube Material (LP) Ouartz / Quartz
Inner Tube Type (LP) Reduce
Inner T/C Outer Tube interior wall type (for CVD)
Tube Sealing O-Ring
Manifold Heater None
Switch Valve for Manifold Cooling Water The reinforced cooling water is used
Soft Backfill Injector Yes
Boat Type 141Slots loader
Boat Material SiC with CVD-Coat
Boat Rotation Yes
Pedestal Type Quartz+SiC
Cap Heater Yes
Auto Shutter Shutter Purge Type
Earthquake Countermeasure N/A
Voltage 3phase 480VAC
3phase connebtion type Beaker Terminal
Voltage Single-phase 120VAC
Single-phase connection type Beaker Terminal
Frequency 60Hz
Wattmeter Maler / Model None
Control Power UPS provided by Customer
Control Power UPS type Fab-wide system
UPS Input Voltage / Output Voltage N/A
Power Cable Input Entrance Location Power Box Top
FNC - Power Box
Power Box - RCU
Power Box - Pump Unit
Power Box - Refill System (if used) N/A
Power Box - WVG CTRL Unit (if used) N/A
FNC - WVG CTRL Unit (if used) N/A
Power Box - Scrubber System (if used) N/A
Power Box - Ozone Delivery System (if used) N/A
Power Box - UPS (if used) N/A
Wiring by Customer
Conduit/Raceways provided by Customer
Host Communications Comply with GJG
Equipment Host I/F Connection Gas box top (OP)
Ingenio Yes
OHT Capability Yes
AGV Capability None
RGV Capability None
PGV Capability None
PIO I/F Location FNC Top
PIO Provided by TEL
PIO Maker /Model Hokuyo / DMS-HB1-Z05
Carrier ID Reader Writer Type RF
CIDRW Load Port Read
CIDRW FIMS Write
CIDRW Maker / Model OMROM/V700-L21
CIDRW Provided by TEL
EEC(Equipment Engineening Capability) None
Customized Management Signals(for WAVES) N/A
Signal Tower Model LOUGWB-24-4
Signal Tower Colors (from the Top） Red/Blue/Yellow/Green
Signal Tower Location Front / operation panel type
Front Operation Panel Yes
MMI and Gas FlowChart FPD & GFC installed
Indicator Type Selete
Operator Switch Operator Access/White Cover with Orange Light
Pressure Display Unit （Gas Inlet / Vacuum） MPa / Torr
Cabinet Exhaust Pressure Display Unit Pa
Waming Label English
Gas Leak Detector Yes
Gas Leak Detector Provided By TEL
Gas Leak Detector Maker Riken
Gas Detector Power Power box
Damage/Missing parts list
Dry pumps are not included with sales
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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