Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Kokusai Quixace Ultimate ALD SiO2

Asset ID: 28037

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Quixace Ultimate ALD SiO2

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: ALDSIOX

Furnace Unit: 

Cartridge Heater - D7EX40096 - Part Qty1 - TUF-CE-L

Thyristor Unit for Control - SKKT160L5Z4F-HKD - Part Qty1 - Air cooling type

Clean Unit: 

Clean Module Unit - BV-R14TF2G1H - Part Qty1 - Wafer transfer area(Transfer)

Clean Module Unit - BV-R09TF2G1L - Part Qty1 - Wafer transfer area(Loading Area)


Main Controller(OU) - D4EX38403(KDSC-2007CONT) - Part Qty1

Main Operation Unit - TM150-HKT05 - Part Qty1

Sub Operation Unit - D4EX40577 - Part Qty1

Process Module Controller - D4EX43195(PMC5000) - Part Qty1

DDC Temperature Controller - D4EX37566(CQ1720-EA) - Part Qty1 - CPU +TC Unit

Gate Drive Unit - D4EX36969(DN-150VR-T5) - Part Qty1

MFC / Pressure Unit - D4EX36215(MFCDNET2) - Part Qty1 - DeviceNet Remote

FOUP Loader Controller Unit - D4EX43172(ROBO5000) - Part Qty1 - Main Unit

Valve / Interlock Control Unit - CJ1G-CPU43H - Part Qty1

Signal Tower (Front) - LME-402W-RBYG - Part Qty1 - Red, Blue, Yellow, Gree

Gas Flow Pattern Panel - V815IXD-U102 - Part Qty2 - ※1

EDA Controller - D4EX38401 (EDA) - Part Qty1 - ※1

Drive Mechanisms: 

I/O Shutter - D5CX42765 - Part Qty1

FOUP Stage - D5CX42946 - Part Qty1

Rotation FOUP Storage - D5CX42938 - Part Qty1 - FOUP receipt number : 16

FOUP Opener - D5CX42562 - Part Qty1 - 2 Ports

Wafer Transfer - D5CX42124 - Part Qty1

Variable Wafer Pitch Converter - (D5CX42124) - Part Qty1

Boat Elevator - D5CX41742 - Part Qty1

Furnace Port Shutter - D5CP73285 - Part Qty1

Boat Rotation - D5CP56443 - Part Qty1

Broken Wafer Detector - (D5CX42124) - Part Qty1

Wafer Transfer Crash Detector - (D5CX42124) - Part Qty1

Boat Changer - D5CP68312 - Part Qty1

Gas System: 

Gas Unit(IGS) - D7VX44897 - Part Qty1 - Stick Type N2, O2, GAS-1

Tape Heater for gas pipe - ----- - Part Qty1set - Si Precursor, H2O, Catalyst,

Bubbler Unit - RVG600W - Part Qty3 -

Canister - BK1200URM - Part Qty3 -

Vapor Controller - VC-1420,,SEF-8240D - Part Qty1

Plasma System: 

RF Plasma Generator - TX06-9001-00 - Part Qty1 - Made by ADTEC

Matching Controller - AMVG-RCM1-AA - Part Qty1 - Made by ADTEC

Matching Unit - AMVG-1000-AA - Part Qty1 - Made by ADTEC

Missing/Damaged Parts List:

Please inspect tool to reconfirm

PRESSURE SENSOR (PSW13)   810-17697- missing Qty 1

BARATRON SENSOR(VG11)- missing Qty 1   

BARATRON SENSOR(VG13)   810-129268- missing Qty 1

BARATRON SENSOR(VG12)   810-119290- missing Qty 1

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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