Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

ASM International A412 Anneal

Asset ID: 207451

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ASM International

A412 Anneal

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 1/27/2023


Process: ANNEAL

Tool config is based on original PO, please verify tool details at tool inspection

System, General Specification

Safety Specification: SEMI S2-0200/ CE-Mark (STD)

Heater Model: MLR

Process Condition: AP

ART Control: None

N2 Load Lock: Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 150wfr

Side Maintenance: None

Software Version (WAVES): Latest

Boat Operation: 2 Boat Type

Temperature Controller: MTC

System, Unit Location

Furnace: Main-Fab

Power Box: Sub-Fab

Pump: N/A

FTR: Sub-Fab

Step Up Transformer: N/A

Step Down Transformer: N/A

Ozone Delivery System: N/A

WVG Controller: N/A

Liquid Delivery System: N/A

UPS: None

System, Factory Automation

Host Communications: Comply with GJG

Group Controller Connection: None

OHT Capability: Yes

AGV Capability: None

RGV Capability: None

PGV Capability: None

PIO I/F Location: FNC Top

PIO Provided by: Customer

PIO Maker/Model: N/A

Carrier ID Reader Writer Type: RF

CIDRW Load Port: Read


CIDRW Maker/Model: Asyst/ATR9100

CIDRW Provided by: ASM

FDC: FDC(Fault Detection and Classification)=N/A

System, User Interface

Signal Tower Model: Insatlled / 4-Color

Signal Tower Colors: Signal Tower Colors (from the Top), Red/Yellow/Green/Blue

Signal Tower Location: (Furnace Front/ Operation Panel Type)

Front Operation Panel: Yes

MMI and Gas FlowChart: FPD & GFC Installed

Operator SW: Standard

Pressure Display Unit: MPa / Pa

Warning Label: English

System, Furnace

Dewpoint Meter for N2 LL: Dewpoint Meter for N2 Load Lock=Yes

RCU Duct Length FNC - RCU: NA

Ionizer (maker/model): None

Chemical PreFilter-Acid: Chemical Pre-filter (for Acid)=None

Chemical PreFilter-Alkali: Chemical Pre-filter (for Alkali)=None

Chemical PreFilter-Hydrocarb: Chemical Pre-filter (for Hydrocarbon)=None

Chemical PreFilter-Location: Chemical Pre-filter Location=N/A

Side FFU Chemical Filter: Side FFU Chemical Filter=None

O2 Control for N2 LL: O2 Density control for N2 Load Lock=Yes

System, Wafer/Carrier Handling

Carrier Type: FOUP/25slots, SEMI STD

FOUP Maker/Model: FOUP Maker/Model= Entegris/F300-2005-17UT1502

Carrier Stage Capacity: 32 FOUP

Info Pad A,B: None


W/T Type: Gemark WHR

W/T Type A/T: Standard

System, Power Distribution

Voltage 3phase: 480VAC

3phase connection type: Star Connection

Voltage Single-phase: 120VAC

Single-phase connection type: N/A

Wattmeter: None

Control Power UPS provided by: Customer

Control Power UPS type: N/A

UPS Input/Output Voltage: N/A

System, Gas Distribution

IGS Type: Integrated Gas System

IGS Maker: Fujikin

Tubing Bends: Bend Less than 90deg

IGS Final Filter: PALL

IGS Regulator: Tescom

IGS MFC: HORIBA STEC-Z500series/ Digital

IGS Press. Transducer: Celerity

Liquid Source Vapor System: Liquid Source Vapor System Maker/Type=None

Gas Leak Detector: None

Gas Leak Detector Provided By: Customer

Gas Leak Detector Maker: Customer - House System

Gas Detector Power: Customers Facility Provided

Detected Gas 1 / Location: H2/Gas cabinet

External Torch Unit: Installed

Burn Out Unit: N/A

PAC: None

Exhaust Pressure Control: N/A

Exhaust Pressure Controller: N/A

Vacuum Exhaust System: N/A

Vacuum Pressure Controller: N/A

Heater Tape Interface: Heater Tape Interface

System, Reactor

Quartz Provided by: ASM

Quartz Vendor Requirement: None

SiC Provided by: N/A

SiC Vendor Requirement: N/A

Liner Tube (AP): N/A

Process Tube (AP, AP+Sub-AP): Quartz Single

Outer/Inner Tube Material: N/A

Inner Tube Type (LP): N/A

Inner T/C: Process Tube interior wall type (for AP Heater)

Tube Sealing: N2 purge+Lip seal

Manifold Heater: N/A

Valve,Manifold PCW: N/A

Soft Backfill Injector: N/A

Boat Type: 170 slots Ladder (5.3mm Pitch)

Boat Material: Quartz

Boat Rotation: Yes

Pedestal Type: Quartz

Cap Heater: None

Auto Shutter: No Storage Purge Type

Earthquake Countermeasure: None

Process Cap: Process Cap

System, Facilities

Exhaust Connection Point: Top Connection

PCW Connection Point: Bottom Connection

Incoming Gas Connection Point: Bottom Connection

Gas VENT Connection Point: Bottom Connection

Exhaust VENT Connection Point: Bottom Connection

Gas Unit Exh Connection Point: Bottom Connection

Power Cable Input Location: Power Box Top

Gas Exhaust Connection Point: Top Connection

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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