Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Mattson Technology, Inc. Aspen III ICPHT

Asset ID: 211066

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Mattson Technology, Inc.



Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Tool Model: Aspen III HT

Software Version: 5.8B19

System Power Rating: 208AC 3-phase

Loading Configuration: 4 load ports

Chm/Unit Position 1: 2 stage/chamber HT type, PO2/PN2/4%H2N2/CF4

Chm/Unit Position 2: 2 stage/chamber HT type, PO2/PN2/4%H2N2/CF4

Process chamber


Transfer module

AC power box

Transfer module: Back Robot Upper/lower arm

ATM Robot: Arm1/Arm2


MFC Gas 1 (O2-10SLM)

MFC Gas 2 (CF4- 200 SCCM)

MFC Gas 3 (H2/N2-5SLM)

MFC Gas 4 (N2-2SLM)

APC(valve + control): KALREZ 8085


EPD Controller: EP200Mmd

Heater Module: WATLOW

Heater Module: Eurotherm

RF gen. model: AE, RFG 3001+13.56 MHz+3000 W


LCD Monitor

Electric&signal cable Length: estimated around 8M 

1.Main Body

1-1 Load Port: Asyst

1-2 Number of load port: 4 Load ports


2-1 Bottom Temp Control: ±5℃(in wafer)

2-2 End Point Detector: Yes

2-3 Chamber Heating Control Type: WATLOW

2-4 Temp Control Range: 80℃∼300℃

2-5 Pre-Heat Function: NO

2-6 RF gen. model: AE

2-7RF gen. model: 3KW

3.System Controller

3-1 CPU: Pentium 4

3-2 Hard disk: 60GB+80GB

3-3 Operation Monitor: 15" LCD

3-4 Signal Tower: Pole type

4.Process Gas Line

4-1 MFC Maker: Aera

4-2 GAS Box Tupe: IGS Type

4-3 Number of gas Line: 

   GAS #1: O2-10SLM

   GAS #2: CF4- 200 SCCM

   GAS #3: H2/N2-5SLM

   GAS #4: N2-2SLM


5-1 Pressure Control: KALREZ 8085

Damage/Missing parts list

Damage: Asyst Load port, Qty 1

Damage: RF cover fan, Qty 2

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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