Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2006-12-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1305742
Micron MISTI/LID #: WMATB3AF00
Vendor Tool Serial #: MT3293
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? No
OEM: MTSN
Tool Model: Aspen III ICP HT
Software Version (include revision #): 8.0B10
System Power Rating: 208V 3-Phase
Loading Configuration: 4 load port
Retrofit Part Type 1: NA
Chamber Name 1: chamber A
Chamber Name 2: chamber B
Chamber 1 Description: 2stage
Chamber 2 Description: 2 stage
Chamber 1 Chemicals Gases Used: PO2/CF4/4%H2N2/PN2
Chamber 2 Chemicals Gases Used: PO2/CF4/4%H2N2/PN2
Not Sold with Tool Description 1: NA
N2 Load Port Exists 1: Yes
N2 Load port Vendor 1: Santa Phoenix Technology Co., Ltd
N2 OEM Stage Available 1: No
N2 Load Port Exists 2: Yes
N2 Load port Vendor 2: Santa Phoenix Technology Co., Ltd
N2 OEM Stage Available 2: No
N2 Load Port Exists 3: Yes
N2 Load port Vendor 3: Santa Phoenix Technology Co., Ltd
N2 OEM Stage Available 3: No
N2 Load Port Exists 4: Yes
N2 Load port Vendor 4: Santa Phoenix Technology Co., Ltd
N2 OEM Stage Available 4: No
Optional Gas 1: O2
Optional Gas 2: CF4
Optional Gas 3: 4%H2/N2
Optional Gas 4: N2
Optional Gas 5: CF4
Optional Gas 6: 4%H2/N2
Custom Gas Lines 1: 10SLM- AERA D980C
Custom Gas Lines 2: 200 SCCM - AERA D980C
Custom Gas Lines 3: 5 SLM - AERA D980C
Custom Gas Lines 4: 2SLM - AERA D980C
Custom Gas Lines 5: 50 SCCM - AERA D980C
Custom Gas Lines 6: 500 SCCM - AERA D980C
Damage/Missing parts list
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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