Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
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Date of Manufacture: 2004
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Tainan 744, Taiwan
Available date: Currently Available
The equipment use of destructive methods to deinstallation the equipment.
Damage/Missing parts list, please inspect tool to reconfirm.
Dry pumps and customer provided items not included on sales.
Inspect to confirm configuration and condition.
The DC Power supply is missing and Heater is damaged.
Install Type is Stand-Alone.
Manufacturer Date is 2004
Date of last PM is 2014
The system not On-Line
SEZ Spin Processor Model is SP304
UI (Front) is present
Status Lamp is present
Chuck Size (Left) is 12
Chuck Size (Right) is 12
No Flip Module
No End Point Detection System
Horiba concentration Monitor (HF Monitor)
ULPA Filter (Top of Main Unit)
FFU Replacement Date is 2013
Robot Support Plate is Present
Robot - CNTRL Filter Replacement Date is 2013
Suck Back Box w/NT flow meter & manual reset
Number of Load-ports is 2 std
Load-port Size (Left) is 12
Load-port Size (Right) is 12
No Load-port Adapters (12->8)
No Wafer ID Reader
No RFID Reade
Chemical Module 1 is SC1
Chemical Module 2 is HF 49%
Chemical Module 3 is H2SO4
Chemical Delivery System (CDS) is CDS
Buffer System for Chemical Cabinet
No Bulk Chem Delivery system (BCD)_Active
No Bulk Chem Delivery system (BCD)_Passive
All Cables are present
There are missing or damaged parts
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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