Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.
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CLEAN TRACK ACT 8 SINGLE BLOCK
Single Block (Resist Coater/Developer)
Date of Manufacture: 1999-02-01
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Gyeonggi-do, Korea, Republic of
Available date: Currently Available
System Right to Left Type
INDEXER 4 Cassette Stage (Uni-Cassette)
MODULE CS Block, Process Block, IF Block, Chemical Cabinet, AC Rack, TCU, THC, Drain Pump Box, UPS, Gas Box, Fire Extinguisher
Configuration 2C/2D, 1ADH, 4CPL, 8LHP, 4CHP, 3TRS, 1CWH, 1WEE
C/S ROBOT TYPE Vacuum Arm / Ceramic Pincette
MAIN ROBOT TYPE 3 Pincette Arm
INDEXER Laser Diode Mapping Sensor
COAT
RRC Pump Resist Nozzle
1 Gallon Resist Bottle / Thinner Facility Supply
EBR Nozzle / Back Rinse Nozzle
Facility Drain (Resist, Thinner)
DEV
Nozzle Tyoe : Spray Nozzle
Rinse Nozzle / Back Rinse Nozzle
Facility DEV Solution Supply/Drain
WEE TEL STANDARD
AD TEL STANDARD
TCU SMC
THC Komatsu
No Missing Parts
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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