Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: 06/06
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 10/21/2022
| OEM | Tokyo Electron Limited | ||
| Tool Model | LITHIUS | ||
| Process | TEL_LITHIUS_365NM | ||
| Software Version (include revision #) | 300.0.21.586 | ||
| System Power Rating | 200V AC 3-Phase | ||
| Loading Configuration | 5 loaders | ||
| QTY | |
| CSB | 1 |
| SPIN1 | 1 |
| OVEN1 | 1 |
| OVEN2 | 1 |
| IFBM | 1 |
| IFBS | 1 |
| THC | 1 |
| COT CAB/DEVCAB | 1 |
| AC POWER BOX | 1 |
| FIRE EXTINGUISHER | 1 |
| Safety: | |
| COT (Line -cleand OK73 shinner) | |
| DEV(Line -cleand DI water) | |
| COT CAB(Line -cleand OK73 shinner) | |
| DEV CAB(Line -cleand DI water) | |
| Other: |
| Chemical Filter(accessories) |
BLOCK DIAGRAM AVAILABLE: PLEASE CONTACCT YOUR SALES PERSON.
Fab15 confirmed there were no missing or damaged parts.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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