Macquarie Equipment Trading on behalf of Micron Technology Utah, LLC

Ulvac Corporation Entron-EX

Asset ID: 207145

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Ulvac Corporation

Entron-EX

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: Currently Available

Software Version  v357-15
System Power Rating   AC208V 3φ 50/60Hz
Loading Configuration  3 Load Ports
Any equipment manuals available?  Yes / No  Available from Vendor
Tool under OEM service contract?   Yes / No No
Chm/Unit Position   F1  Normal - Carbon
Chm/Unit Position   F4  Normal - Carbon
Chm/Unit Position   R1  Normal - Carbon Nitride
Chm/Unit Position   R2  RF - MATY
Chm/Unit Position   R3  RF - MATY
Chm/Unit Position   R4  Normal - Carbon
Chm/Unit Position   B1  Degas
Chm/Unit Position   B2  Degas
Chm/Unit Position   LLA  Load Lock
Chm/Unit Position   LLB  Load Lock


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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