Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Rapid Thermal Processing (RTP) Equipment
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
Factory Interface
o Wafer exchange platform (passive cooldown slots)
o 2 stationary robots
o Pre-aligner
o 2 Load locks
o 2 N2 Loadports w/ chrome lift pins
o Cool-down station/pass-thru
· Mainframe (including loadlock)
o 4 cooling station loadlocks (QWLL) with N2 purge
o Dual robot
o 1 pump for QWLL
o Atmospheric pressure operation
· Anneals Twin Chamber
o Dual zone heaters
o Matte shower head
o Lift pins
o Liners (2/chamber)
o 1 pump for 3 twin vacuum chuck
· Chamber Gas Panel
o 3 gas sticks
o Z700 MFCs
o Pressure regulators
o Block valves
o POC filter
· Additional Items
o Loadlock cooling capability
o Pyrometry system
o POU Filters
o Additional N2 Load Port
o Additional gas stick
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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