Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC
Lam / Novellus Systems Inc. VECTOR SOLA UV Cure
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Asset ID: 18842
Enquire about this product Print spec sheetPECVD (Chemical Vapor Deposition)
Equipment details:
Date of Manufacture: 2006-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Tainan 744, Taiwan
Available date: Currently Available
Description:
HARD DRIVE WILL BE REFORMATTED. OPERATING SOFTWARE IS NOT INCLUDED.
Missing parts please refer to the photo
Inspect to confirm configuration and condition.
The power supply*8 and Heater are missing.
The Front-End Interface is 2LPS.
Factory Automation is OHT.
Robot Type is ATR8.
Facilities Configuration is bottom.
Primary User Interface Loc. is left.
The Spindle and LL Pedestal are Pneumatic.
The Pedestal Type and Gate Valve Type is Standard.
Missing parts comparison table,
|
Item |
PARTS |
2021 Qty |
2024 Qty |
|
1 |
system controller |
1 |
0 |
|
2 |
module controller |
1 |
0 |
|
3 |
power supply |
8 |
0 |
|
4 |
transformer |
1 |
0 |
|
5 |
heater |
1 |
1 |
|
6 |
SIOC 0 |
1 |
1 |
|
7 |
SICO 1 |
1 |
1 |
|
8 |
SIOC 2 |
1 |
0 |
|
9 |
FE interface board |
1 |
0 |
|
10 |
ATM switch |
2 |
2 |
|
11 |
pressure gauge |
2 |
1 |
Product images
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Novellus Systems Inc., VECTOR SOLA UV Cure
Lam / Novellus Systems Inc., VECTOR SOLA UV Cure
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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