Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials Reflexion

Asset ID: 206033

Print spec sheet

Applied Materials

Reflexion

Multi-Process CMP

CMP Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

CMP 15-3AMAT_REF-3_4SON AMAT REF-3


Tool has been de-installed and is stored in an off-site warehouse.

A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.

No photos provided: Please inspect to collect photos.


[Platen1]

>30inch platen

 (max133rpm)

>4inch pad conditioner

 (DDF3type,30-120rpm)

>slurry line1:D4505

 (max400ml/min)

 (tube pump)

>torque end point system


[Platen2]

>30inch platen

 (max133rpm)

>4inch pad conditioner

 (DDF3type,30-120rpm)

>slurry line1:D4505

 (max400ml/min)

 (tube pump)

>torque end point system


[Platen3]

>30inch platen

 (max133rpm)

>4inch pad conditioner

 (DDF3type,30-120rpm)

>slurry line1:CES333

 (max400ml/min)

 (tube pump)

>torque end point system


[Head1]

>membrane press head

 (3zone 0-15psi)

>head spindle

 (max200rpm)


[Head2]

>membrane press head

 (3zone 0-15psi)

>head spindle

 (max200rpm)


[Head3]

>membrane press head

 (3zone 0-15psi)

>head spindle

 (max200rpm)


[Head4]

>membrane press head

 (3zone 0-15psi)

>head spindle

 (max200rpm)


[Cleaner1]

>megasonic 2roller+1idler

>circulating DIW flow

 (2.0l/min)

>control temp

 (20-50deg)

>megasonic power

 (950kHz,600w)

>wafer rotation speed

 (6rpm)

 

[Cleaner2]

>2brush 3roller+1idler

>rotation speed

 (brush:max700rpm)

 (wafer:max50rpm)

>DIW delivery 

 (DIW:2000ml/min)

>chemical delivery

 (NH4OH:2000ml/min)

>brush rinse

 (DIW:1000-4000ml/min)


[Cleaner3]

>2brush 3roller+1idler

>rotation speed

 (brush:max700rpm)

 (wafer:max50rpm)

>DIW delivery 

 (DIW:2000ml/min)

>chemical delivery

 (FPM:2000ml/min)

>brush rinse

 (DIW:1000-4000ml/min)


[Dryer]

>spin rinse dryer

 (max:2500rpm)

>ramp heater

 (1000w infrared heater )


[load port]

>3load port 

 

Other missing or damaged parts: Not reported.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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