Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

LAM Research Rainbow 4720

Asset ID: 208351

Print spec sheet

LAM Research

Rainbow 4720

Metal Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 1999

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Hsinchu, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

Software Type is Lam Envision.

All the cables are present.

Etcher mainframe type is Rainbow.

The Electrostatic Chuck / Signal Lamp Tower / Built-In SMIF / Endpoint Detection System are include.

The Equipment Rainbow Mainframe include Autoloader / Built-In Hepa Filter / Orbitally Welded Gas Box / Backside Helium Cooling / Heated Pumping Manifolds / On-Board RF Generators / Remote RF Cart / Remote Gas Box / Remote Operator Interface / Remote AC Box / Atmospheric Passivation Module / High Condctance Manifold.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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