Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: AUGUST 31, 2005
Currently Configured for: To be determined
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 5/25/2023
IMPLANT 15-3VARI_VSTHC_HC VARI VSTHC HC
Tool is operating.
Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts.
tilt angle 0-60deg.,twist angle 0-359deg.
Plasma Flood Gun
Ion Source: IHC(Tungsten)
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