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HDP CVD (Chemical Vapor Deposition)
Date of Manufacture: 2003-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Singapore, Singapore
Available date: Currently Available
| Equipment ID | HDPCVD-01 | |||
| Date of Audit | 17-Feb-22 | |||
| Electrical Requirements | AC 208V | |||
| Original Ship Date from Novellus | 27-Nov-03 | |||
| QNX Platform Version | 1 | |||
| Software Version | 5.1 | |||
| Date of Last PM | Jun-21 | |||
| Is System On-Line? | No | |||
| Off-Line Date (if applicable) | Jun-21 | |||
| CE Mark Certified? | Yes | |||
| OEM Audit Available? | Yes | |||
| Decontamination Report Exists? | Yes | |||
| Can Produce Wafers AS IS? | Yes | |||
| Any Known Field Modifications? | Yes | |||
| All Cables Present? | Yes | |||
| Serial Number | ||||
| WTS | 9 | |||
| Module A | 2 | |||
| Module B | 8 | |||
| Module C | 7 | |||
| Module A | C3 | |||
| Module B | C3 | |||
| Module C | C3 | |||
| Speed, Speed xT, Speed NEXT, Speed MAX | STI, IMD | |||
| Front-End Interface | 3 LPs | |||
| FOUP RF ID Reader | Yes | |||
| Signal Lamp Tower | Yes | |||
| Factory Automation | OHT | |||
| ATM Robot Type | Brooks | |||
| Vacuum Robot Type | Brooks/Magnatran 7 | |||
| TM Turbo Pump | Yes | |||
| Make/Model | PFEIFFER/TC750-E74 | |||
| UPS | NA | |||
| SECS/GEM | Yes | |||
| Facilities Location | Bottom | |||
| Remote Interconnect Cable Length | 10m | |||
| WTS Vacuum PEC Location | PEC Station | |||
| Primary User Interface Loc. | Right / Left | |||
| Nanofill 1 | Yes | |||
| RF Match Type | ENI MWH-100 | |||
| Heated Foreline | No | |||
| Active Temperature Control | No | |||
| ESC Type | HEX | |||
| Gate Valve Mfg & Model | VAT | |||
| Pedestal Lift Type | Dual Position | |||
| Temp Monitoring | NTM 500C | |||
| Remote Clean | No | |||
| RPC | No | |||
| RF Generator Rack | Yes | |||
| SSD | No | |||
| Chamber Position | Turbo Mfgr. | Turbo Model | ||
| Module A | Leybold Vacuum | Mag2000C | ||
| Module B | Leybold Vacuum | Mag2000C | ||
| Module C | Leybold Vacuum | Mag2000C | ||
| Module A | AE | AE | ||
| Module A | ENI | ENI8000 | ||
| Module B | AE | AE | ||
| Module B | ENI | ENI8000 | ||
| Module C | AE | AE | ||
| Module C | ENI | ENI8000 | ||
| Manufacturer | Edwards | |||
| Model | IH1000 | |||
| Quantity Required | 3 | |||
| Included With System | Yes | |||
| Manufacturer | Edwards | |||
| Model | IH80 | |||
| Included With System | Yes | |||
| Gas Box Part Number | 79-264173-00 | |||
| Maximum # of Lines | 8 | |||
| Gas Line # | Gas | Flow (sccm) | MFC Mfgr. | MFC Model |
| 1 | N2 purge | NA | NA | NA |
| 2 | O2 | 500 | AERA | FC-7800CD |
| 3 | NF3 | 2000 | AERA | FC-7800CD |
| 4 | HE | 2000 | AERA | FC-7800CD |
| 5 | AR | 500 | AERA | FC-7800CD |
| 6 | H2 | 2000 | AERA | FC-7800CD |
| 7 | SiH4 | 200 | AERA | FC-7800CD |
| 8 | N2 purge | NA | NA | NA |
| Notes: | ||||
| Nanofill 1: Toggle Clean, Pfeiffer 2100 TMP, AE Match at Pedestal box | ||||
| Nanofill 2: Multi-position Pedestal, Manual Tune Match at Top, Nanofill Two dome. | ||||
| Speed NeXT: Two sections on top of the RF Enclosure, RPC on the side | ||||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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