Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) Expedius

Asset ID: 31234

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Tokyo Electron Ltd. (TEL)

Expedius

Batch Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 12/17/2021


Process: LAL

Tank: LAL30
Guide Material:PCTFE
Process Bath    Material:PTFE
Temp.:20℃
Mixing Ratio (1): "LAL30 
1:0"
Replenishment: Time    Yes
Replenishment:Level    Yes
Replenishment:Recipe    Yes
Replenishment:Pre/Post/Interval    Yes
Replenishment:Batch Count    Yes
Bath Function:Bath Autocover    Yes
Bath Function:Bath Cleaning    Yes
Bath Function:Sampling Line     Yes
Pump        IWKI : FF-20-BT1
Heater        Coolnics(NES-3123C-7-T)
Filter        "IHAT01M01K 0.01um"
Conc. Monitor        "CS-13M-777-
18P5390340P5P5"
Drain Line:WD1N     Yes
Drain Line: WD2 (Neutralization Waste Water Treatment)    Yes
Drain Line: WD3 (UPW Reclaim)    Yes

Tank: QDR
Guide Material:PCTFE
Process Bath    Material:Quartz
Temp.:RT
Bath Function: Over Flow Rinse Yes
Bath Function: Shower(Spray) Yes
Drain Line:WD1 (HF Waste Water)    Yes
Drain Line:WD3 (UPW Reclaim)    Yes

Tank: POU1
Guide Material:Quartz
Process Bath    Material:PTFE
Temp.:RT/70℃
Mixing Ratio (1): HF:H2O
Mixing Ratio (2):"NH4OH:H2O2:H20
1:10:400
1:4:400
1:1:200"
Mixing Ratio (3):"NH4OH:H2O
1:100~1:200"
Mixing Ratio (4):"H2O2:H2O
1:15~1:200"
Mixing Ratio (5):"HCL:H2O2:H2O
 1:1:50 ~ 1:1:100"
Bath Function: Over Flow Rinse Yes
Bath Function: Shower(Spray) Yes
Bath Function: Agitation Yes
Bath Function: Megasonic SSDM 2800W
Bath Function: Hot DIW Generator PWH-144I-T-R
Bath Function:Sampling Line     Yes
Cold DIW (Facility): 40 ~ 60 L/min
Hot DIW (Facility): 40 ~ 60 L/min
Conc. Monitor: "DHF/NH3 (HF-960M)
APM/HPM(CS-15M~)"
Drain Line:WD1 (HF Waste Water)    Yes
Drain Line: WD2 (Neutralization Waste Water Treatment)    Yes
Drain Line: WD2N (Alkali Conc.)    Yes
Drain Line: WD3 (UPW Reclaim)    Yes

Tank: POU
Guide Material:Quartz
Process Bath    Material:PTFE
Temp.:RT/70℃
Mixing Ratio (1): HF:H2O
Mixing Ratio (2):"NH4OH:H2O2:H20
1:10:400
1:4:400
1:1:200"
Mixing Ratio (3):"NH4OH:H2O
1:100~1:200"
Mixing Ratio (4):"H2O2:H2O
1:15~1:200"
Mixing Ratio (5):"HCL:H2O2:H2O
 1:1:50 ~ 1:1:100"
Bath Function: Over Flow Rinse Yes
Bath Function: Shower(Spray) Yes
Bath Function: Agitation Yes
Bath Function: Megasonic SSDM 2800W
Bath Function: Hot DIW Generator PWH-144I-T-R
Bath Function:Sampling Line     Yes
Cold DIW (Facility): 40 ~ 60 L/min
Hot DIW (Facility): 40 ~ 60 L/min
Conc. Monitor: "DHF/NH3 (HF-960M)

Drain Line:WD1 (HF Waste Water)    Yes
Drain Line: WD2 (Neutralization Waste Water Treatment)    Yes
Drain Line: WD2N (Alkali Conc.)    Yes
Drain Line: WD3 (UPW Reclaim)    Yes

Tank: SD2
Guide Material:PCTFE
Process Bath    Material:PTFE
Temp.:RT
Bath Function: Over Flow Rinse Yes
Bath Function:Bath Autocover    Yes
Bath Function:N2 Purge    Yes
Cold DIW (Facility): 40 ~ 60 L/min
Filter        PIPW15C3S (Metal)
Drain Line: WD3 (UPW Reclaim)    Yes
Drain Line: WD7 (Organic Waste Water)    Yes

Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps not included on sales    

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