Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Unisem UN-2002A-PG

Asset ID: 209437

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Unisem

UN-2002A-PG

Abatement - Scrubber

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Excess itemsVendorModelQty
AbatementUNISEMUN2002A-PGS8
AbatementUNISEMUN2002A-PGD1
AbatementUNISEMUN2004A-PGS3


AreaVendorTypeModeloverhaulS/NBonded No.Fixed Asset No.location
FSTUNISEMabatementUN2002A-PGdone PMU07JP-SLA-383AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07JP-SLA-389AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07DP-SLA-222AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07BP-SLA-078AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07DP-SLA-225AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07BP-SLA-077AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07BP-SLA-063AN/AN/AA1-1F
FSTUNISEMabatementUN2002A-PGdone PMU07BP-SLA-080AN/AN/AA1-1F
FSTUNISEMabatementUN2004A-PGDdone PMU14DP-SMA-143AN/AN/AA1-1F
FSTUNISEMabatementUN2004A-PGSdone PMU14DP-SMA-144AN/AN/AA1-1F
FSTUNISEMabatementUN2004A-PGSdone PMU14EP-SMA-155AN/AN/AA1-1F
FSTUNISEMabatementUN2004A-PGSdone PMU14JP-SMA-397AN/AN/AA1-1F



System Features

1. Type : Fuel (LNG, LPG, H2) Burn -Wet

2. High abatement efficiency for PFC gases (99%)

3. Minimizing moisture vapor exhaust (Apply dry system)

4. Excellent safety interlock system

5. Relatively lower operation cost

6. Simple operation and easy maintenance

7. High corrosion resistance structure

8. CE-Mark & SEMI-S2 certified

Target abatement gas

1. PFCs : NF3, C2F6, SF6, CF4, C3F8, etc

2. Flammable gases : SiH4, PH3, TEOS, H2, DCS, etc

3. Water soluble gases : Cl2, HCl, HF, NH3, etc


Item

Specification

Remark
NECAUN2004A-PGSUN2004A-PGS

Dimension(mm)

600x900x1600 (WxDxH)

900x800x1800 (WxDxH)1250x1000x1880 (WxDxH)
Flame Temperature(°c)1200~1600°c1200~1600°c1200~1600°c
Capacity300LPM300LPM600LPMExcept Scrubber Utility
Electric PowerSingle Phase, 208V, 30ASingle Phase, 208V, 30ASingle Phase, 208V, 30A
Weight350kg500kg800kg
Inlet PortNW40 x 4port(Standard)NW40 x 4port(Standard)NW40 x 6port(Standard)User Option


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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