Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Chandler, United States
Available date: Currently Available
· Cymer XLA-165 45 W, 4kHz laser
· 4 FOUP Loadports
· Projection Lens, The Starlith, Aerial E illumination system, Quasar illumination module, Beam Delivery system
· Alignment System
o Wafer alignment using ATHENA
o Reticle BLUE alignment
o ATHENA narrow marks
o TOP 1 and TOP 2
· Lot streaming, Scanning stages, Wafer handling, Exposure chucks, Lot overhead reduction
· Focus control and field by field leveling, Focus Spot Monitoring, CD-FEDC, LS MATCH2
· Reticle shape correction
· System calibration and image quality control, in-situ metrology (ILIAS, SAMOS), Lithoguide, Pupicom, Dosemapper
· UNIX/SUN Architecture for user interface
· Reticle management, reticle error compensation
· DOE Low Sigma 193
· Aux Port 300mm FOUP/25 wafer
· IRIS for Twinscan 6 Inch
· Integrated reticle library
· Reticle CIDRW ASYST
· 24 Character barcode
· Foup Lock-Out System
· DOE Multipole
· Universal Reticle chuck/stage
· Beam analysis module
· EFESE
· PPD Iris Twinscan
· Water cooling for electronics cabinet
· Software version 4.0.0 or newer
· Inline left or right configuration available
· Additional information available upon request.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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