Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
PROBE TCP-3ACCR_16PINC1D TSK UF3000 Final Probe
Other Missing or damaged parts: Not reported. Please inspect to confirm.
Loader Type: TSK
Number of Loaders: 1 Single loadport
Cassette ID Reader: Yes, KEYENCE BL-601HAC1
Chuck Size: 12"
Chuck Top Material: NICKEL COATING
Low Temp Chuck: YES, Type: ARTS-LC12
Chuck Temperature Range: -40~150℃
Temperature Unified Chuck Option: Yes
Low Noise Chuck Option: No
External Chiller Unit: Yes, SHI SCU500S
High Force Z Drive: No
Auto Probe to Pad Alignment: Yes
Needle Mark Inspection: Yes
Fail Mark Inspection: Yes
Surface Wafer ID OCR: Yes, INSIGHT 1700 series
Wafer ID Barcode Reader: No
Needle Cleaning Option (Double Brush): No
Auto Needle Height and Align: Yes, Auto/Manual card change
Soak Time Option: Yes
Probe Card Changer: Yes
3-64 Multi-site Probing: 1~1024
GPIB Interface: Yes, ACCRETECH STANDARD COMMAND
RS232 Interface: Yes
RF Tag: No
Software Version: S8.39.CM
P/C unit no.: ACCT-072
User ID / Password: Default
Integrated Printer: No
Manipulator: Hinge, MHF6000
Test System Interface: Micron C1D (tester is not included)
Tool is a Cold temperature range prober.
X,Y Overall Accuracy：±2.0µm (Temp Stability ±1℃
X,Y Stage Accuracy：±1.0µm
Z Axis Stroke(Applicable stroke)：37mm
Z Axis Control Accuracy：±2µm
Temp. Range：-40 to 150℃
Tool is a Right SIDE LOADER.
Tool was docked with an ?? tester.
UF3000 Standard Feature
Overall Accuracy Within 2 µm
Wafer Size 8", 12"
X/Y axis Probing Area ±170 mm (X/Y axis Probing Area)
X/Y axis Maximum Speed X axis 300 mm/s Y axis 230 mm/s
Z axis Full Stroke 37 mm
Z axis Maximum Speed 30 mm/s
θ axis Rotation Range ±5 deg.
Fine Alignment CCD ITV Image Processing
Loader Cassette Mounts 1 (2nd cassette with option)
Loader Wafer Handling Robot Arm / Backside Holding
Hard Disk 3.5" 20GB (1 unit standard)
Floppy Disk 3.5" 2HD / 2DD (1 unit standard)
MO 230 / 540MB (1 unit standard)
Display 12.1" TFT Color LCD
Power Consumption Less than 2kVA
Air Supply Source Pressure 0.6 MPa or more
Air Supply Consumption Approximately 0.1 liters / wafer
Vacuum Supply Less than -80 kPa, 30 liters / minute
Dimensions 1508W × 1587D × 987 H mm
Weight 1500 kg (Standard)
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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