Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

JEOL JFS-9855S

Asset ID: 209986

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JEOL

JFS-9855S

Focused Ion Beam System

Circuit Analysis and Editing

Equipment details:

Date of Manufacture:

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Hsinchu, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

Factory Interface is Integrated Open Cassette 

Date of Last PM is 2020/07/20 

Off-Line Date is 2021/01/08 

Electrical Requirements is 220V 

All Cables are Present 

All Covers are Present 

No GEM/SECS Interface   

Main Platform type is JFS-9855S

Magnification Range:100~80000 

Tilt Range:0~60 

Resolution:10A 

Accelerating Voltage Range:800~3000 

Damage/Missing parts list, please inspect tool to reconfirm

Damage-HV

Damage-HD

Damage-EDX Module


Feature

High SIM resolution : 7nm (30kV)

High SEM resolution : 5nm (1kV)

High quality SEM images ( 1280 X 1024 picls)

Stage tilt : 0∘ to 60∘ (Wafer)

Quick switching between FIB milling and SEI observation modes

Equipped with a C to C auto-loader

Coordinate linkage with optical defect inspection system and laser microscope

Recipe capability for wafer information and observation/milling condition

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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