Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC

Tokyo Electron Ltd. (TEL) TELFORMULA LPRO

Asset ID: 210197

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Tokyo Electron Ltd. (TEL)

TELFORMULA LPRO

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2003 Nov

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available

EQUIPMENT IDPADOX-01
AUDIT DATEJAN. 13, 2022
SERIAL NUMBERP00000335021
ORIGINAL SHIP DATESEPT. 2005
SOFTWARE VERSIONTELFORMULA-2 VERSION 1.41 REV. R009 (F007FF-00000)  SOFTWARE NOT INCLUDED
SYSTEM CONTROLLERTEL WAVES
DATE OF LAST PMAUG. 2021
SYSTEM ONLINEYES
CAN PRODUCE WAFERS AS ISYES
KNOWN FIELD MODSYES
ALL CABLES PRESENTYES
TEL MODEL NUMBERFORMULA REV 0
TEL PROCESS NAMETHERMAL 
CUSTOMER PROCESS NAMEPADOX 
TEMP RANGE0-1000C
HEATER ELEMENT MODELMID-TEMP VCM-50-003L
PROCESS CONDITIONLP
FORCE AIR COOLINGYES
SIDE MAINTENANCEYES
N2 BOAT SHOWER WAFER COOLINGYES
FURNACE TEMP CONTROLLERYES
AUTO SHUTTERYES
WAFER TYPE300MM SI SEMI STD NOTCH
CARRIER TYPEASYST TYPE G4
CARRIER STAGE CAPACITY4
WTU TYPETEL
QTY OF PRODUCTION WAFERS50
BOAT OPERATIONSINGLE
MFC OEMHORIBA
PRESSURE TRANSDUCERNAGANO KEIKI ZT15-Z20-17110(-0.1-0.5MPA)
GASMFC MODELLINEMFC SIZE
N2  F750BMOA1-800A-UCNX50SLM
N2  F740BMOA1-800A-UCN15SLM
N2  F730MOA1-800A-UCN21SLM
N2  F730MOA1-800A-UCN31SLM
H2 F730MCA1-800A-UCH11SLM
H2 F740MCA1-800A-UCH25SLM
H2 F730MCA1-800A-UCH32SLM
H2 F730MCA1-800A-UCH42SLM
O2F730MOA1-800A-UCO11SLM
O2F740BMOA1-800A-UCO25SLM
O2F740BMOA1-800A-UCO45SLM
O2F730MOA1-800AO350SCCM
NOF730MOA1-800A-UCXN12SLM
N2OF740BMOA1-800A-UCJ110SLM
MID-TEMP HEATERS00166690ALLOY
VACUUM PUMP INCLUDEDYES
OEMEDWARDS
MODELIH1000
N2 BALLAST PRESSURE CONTROLNO
VACUUM GAGES
2T1
10T1
100TN
1000T1
LOW VAUUM VALVEYES
MAIN VALVEYES
ELCTRICAL REQUIREMENTS400V
OPERATING SOFTWAREWAVES










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