Tokyo Electron Ltd. TELINDY Oxide

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Boise, United States

Available date: Currently Available

Tool Status: Powered up.

Configuration. Audit to verify.

I. Base Unit for LPRO MLD Process

  Including

(A)Cabinets /Units /Controllers

*Furnace Cabinet (Including Ultra-clean Air Flow System)

*Scavenger and Water Cooling Unit

*Power Supply Unit, (U/P Box)

(Including Control Unit, Transformers, SCR, and Breaker Unit)

*Main Controller (waves)

*Temperature Controller

-

(B)FOUP and Wafer Handling Automation

*FOUP Load Port

*FOUP Transfer

*18 FOUP Stocker

*FIMS Port

*KHI Wafer Load Automation

*Boat Elevator w/Boat Rotation Mechanism

*Variable Pitch Change Mechanism (w/5 fork)

*Auto Tube Shutter

(C)100wfs FTP Heather: VOS-56-101

*Includes Outer/Inner T/C

(D)INtergreated Gas System for LPRO

*O2 gas stick

*H2 gas stick

*N2O gas stick

*NO gas stick

*Purge N2

*Vacuum Vent

*Exhaust Vent

*Piping tape heater

(E)Vacuum foreline configuations

*100A foreline piping

*Foreline heater

*APS Main Valve

*Vacuum Gage & Pressure switch

(F)US Safety (s2-0302, S8-0999)

(G)Quartzware Set for LPRO

(Icluding 100 slots Quartz Boat & All quartz reactor)

II.Per System Options-

(a)N2 Load Lock Option

(Including O2 Analyzer)

(b) Dual Boat Operation

(c)Fixture for Start Up and Maintenance

(d)N2 boat cooling shower

(e) Final Valve unit

(f) WVG Unit        

(g)O3 generator unit