Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Ushio UMA-2003

Asset ID: 13755

Print spec sheet

Ushio

UMA-2003

UV Cure System

Resist Processing Equipment

Equipment details:

Date of Manufacture: 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 7/9/2021

Model: UMA-2003-H120F

Model: UMA-2003-H120F-IM01
Process: 6500-35 GATE RESIST CURE

Basic System: UMA-2003-H120F UVC, Qty 1
Wafer Size: Capable of processing 300mm +/- 0.05mm (SEMI M28), 775 +/- 25um, notched wafers, Qty 1
Carrier: 2 FOUP, Qty 1(TDK TAS-300)
Interface: 2 FOUP (Continuous flow operation). With Semi compliant MENV and FIMS assemblies
Carrier ID: Bar code, Qty 2
Communications Protocol: HSMS, Qty 1
EMO: Display and Main Unit (including attached Mini-environment) have front and back EMO, LAMP POWERSUPPLY UNIT FRONT SIDE, Qty 4
Interlocks: Power Supply Unit and Mini-environment have panel (cover) interlocks. Open lamp house
Cable Lengths: 15 meter cables run between the main unit and the Lamp?Supply unit, Qty 1
Signal Tower: Red/Yellow/Green, Qty 1
CL plate: Hp on the CL plate(with vacuum), Qty 1
Detection sensor(port1,port2): The FOUP up and down a transmission sensor Installation, Qty1
LAMP POWER SUPPLY?UNIT: LAMP?POWER SUPPLY?UNIT
CHILLER?UNIT: Qty 1
ROBOT?Controller?Unit: Qty 1
Bulk Gas: CDA Peak Flow=280, Ave Flow=5.4, Static pressure0.5?0.6M??
Bulk Gas: N2?FLOW10?50????n, Static pressure0.5?0.6Mpa
Bulk Gas: Vacuum?-80???,Flow?40L/Min
Electric: 200V±10V? 3PH 50/60Hz?175A? for Tool
Electric: 200V±10V? 3PH 50/60Hz?33A? for Chiller Unit
Water supply: Temperature?10?25? Flow? 6L/Min(over) Pressure?0.5?0.6Mpa for tools
Water supply: Temperature?25?(following), Flow?60L/Min(over), Pressure?.1Mpa(over)for Chiller unit
Exhaust: 6m3/min
Lamp cooling?20m3/min
Lamp power supply Exhaust?7m3/min Qty 3

Missing/Damaged Parts List
None report, please inspect tool to reconfirm

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.