Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Hsinchu 300, Taiwan
Available date: Currently Available
Inspect to confirm configuration and condition.
Date of Last PM : 17th Dec 2015
System is not On-Line
Off-Line Date (if applicable) is June 2016
All Cables are present
Handler Type : Lifter
# of Cassette / FOUP Loaders : 4
No pre-aligner
Communication Interface is SECS
Facility Requirements :
CDA : 5-7 Kg/ cm2
DIW : 75 PsiG/min
Vacuum : Φ150mm 4M / min
Gas : 2 – 4 Kg/ cm2
Power : 208V 60Hz 304W 150A
The Quartz tube*2 / Quartz boat*2 / Matcher*2 / Screen*3 / ISO*2 / Throttle valve*2 / Lifter arm*1 / PLC CV1000*2 may have been missing or damaging.
Not include the Asyst LPT 2200 SMIF loader*2.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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