Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Mattson Technology, Inc. Aspen III Highlands

Asset ID: 209766

Print spec sheet

Mattson Technology, Inc.

Aspen III Highlands

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

The Robot / PC / PCB are missing.

Front End Type is Enhanced Cassette Loading

Number of Cassette / SMIF / FOUP Loaders:3

Software Version 5.0b10

Date of Last PM is 2018/3/7

The system not On-Line

All Cables are Present

Gas Box Type is Standard 

Platfrom Type isAspen III(Highlands)

System Configuration

Rear Chamber is Dry chamber

(Right) Side Chamber is Dry chamber

Generator Details 

Rear (1) AE RFG-3001

Rear (2) AE RFG-3001

Side (1) AE RFG-3001

Side (2) AE RFG-3001

Gas Box Configuration

Gas Line #

Gas Line #1.N2 100(sccm) / SAM(SFC2481FX1 MC-4VQ24)

Gas Line #2.CF4 200(sccm) / SAM(SFC2481FX1 MC-4VQ24)

Gas Line #3.O2 2000(sccm) / SAM(SFC2481FX1 MC-4VQ24)

Gas Line #4.O2 200(sccm) / SAM(SFC2481FX1 MC-4VQ24)

Gas Line #5.H2 300(sccm) / SAM(SFC2481FX1 MC-4VQ24)

Gas Line #6.CHF3 1000(sccm) / SAM(SFC2481FX1 MC-4VQ24)

Gas Line #7.N2H2 500(sccm) / SAM(SFC2481FX1 MC-4VQ24)

Gas Line #8. AR 500(sccm) / SAM(SFC2481FX1 MC-4VQ24)

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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