Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Endura II Front-End Metallization
PVD (Physical Vapor Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Process: 100s 55 BDL
Software Version: CPCI B50140
System Power Rating: 208 AC 3-Phase +480V Noraml
Loading Configuration: 3 load port
Chm Position 1: CIPW; Chemicals/ Gases Used: N2,Ar
Chm Position 2: CIPW; Chemicals/ Gases Used: N2,Ar
Chm Position 4: CIPW; Chemicals/ Gases Used: N2,Ar
Process Type: CIP W
Chamber position: 1,2,4
Shutter option: yes
chamber body part number: 0040-98657
Slit valve seal (bonded or o-ring): Bonded
Slit Valve door part number: 0040-84391
Target vendor: Nikko
Target No.: TAG81
Bakeout/idle power (%): 40
E-Mag Power Supply: na
E-Mag Supply Vendor/Type: na
OEM Part Number: na
DC Power supply(AE-MDX): ENI Optima DCG-200Z
AMAT Part number Slave: 0190-22928
OEM Part Number Slave: na
Generator Size : 10kw
Total DC (12 kwh,24kwh, etc): 10kw
Bias Generator : na
AMAT Part number : na
OEM Part Number: na
Bias Generator Size: na
Bias Generator Frequency: na
Rf coil generator: na
AMAT Part number : na
OEM Part Number: na
DC Coil Power Supply: na
AMAT Part Number: na
OEM Part Number: na
Magnet rotation speed (rpm): 95rpm
Magnet shim thickness: na
Magnet type: CIPW
Magnet part number: 0010-30631
Magnet Serial Number (man. Date): no need
Target to magnet spacing(mm): 0.74mm
adaptor p/n: 0040-80366 Rev3
Kit spacer upper p/n: na
Kit spacer lower p/n: na
upper shield p/n: 0020-91244(one piece)
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): na
lower shield p/n: 0020-91244(one piece)
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): na
inner(or mid) shield p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
shield clamp p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
inner(or mid) shield clamp p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
lower shield clamp p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
pedestal cover p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
dep ring p/n: 0200-05896
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): na
cover ring p/n: 0021-32761
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): na
insulator bushing p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
Shutter: 0021-26896
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): na
pedestal type: ESC
pedestal p/n: 0010-27430
heater spacing in mm: 57
heater spacing in steps: -46800
min heater spacing in mm: 31
min heater spacing in steps: -69000
max heater spacing in mm: 57
max heater spacing in steps: -48250
Lift fingers p/n: no concern
Lift hoop p/n: no concern
Cryo restrictor(Y/N): na
Cryo restrictor Part Number: na
Max Cryo regen gas load (L): 800
Cryo gate valve (2/3 pos): na
MFC 1 Gas: N2
MFC 1 Cal Factor: na
MFC 1 Size: 100
MFC 1 Type: na
MFC 1 Part Number: na
MFC 2 Gas: na
MFC 2 Cal Factor: na
MFC 2 Size: na
MFC 2 Type: na
MFC 2 Part Number: na
MFC 3 Gas: Ar
MFC 3 Cal Factor: na
MFC 3 Size: 200
MFC 3 Type: na
MFC 3 Part Number: na
MFC 4 Gas: ArH
MFC 4 Cal Factor: na
MFC 4 Size: 20
MFC 4 Type: na
MFC 4 Part Number: na
Chamber base pressure (T): 0.00000005
Chamber Rate-of-Rise(nTorr/min): 294
Press. and ROR at Startup: no concern
Pressure Rise 1 min: no concern
Pressure Rise 5 min: no concern
Pressure Rise 10 min: no concern
Pressure vs. Gas Flow table: no concern
Process Ar Supply Pressure: 37
Process N2 Supply Pressure: 33
Cryo Regen N2 pressure: 100
Vent Ar pressure: 48
Optional Gas (He): na
O2 (Ch. F): na
H2(Ch. E): na
H2(Ch. C): na
CDA: 87
SLIT VALVE CDA: 88
Cooling Water Flow (GPM): 10.2
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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