Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

LAM Research 2300 Versys KIYO Poly

Asset ID: 67450

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LAM Research

2300 Versys KIYO Poly

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Section 1. Tool General Information 
Micron MISTI/LID #  L2KYB71400
Vendor Tool Serial #  1017439-10-02-0460
Month / Year of Tool Move In  2010
Tool Availability Date  10/25/2019
Tool Current Status De-installed
Tool working condition  Working
Tool Location  Warehouse
Any modification/conversion/refrofit was perform to the tool? No
    
Section 2. Move-out constraint  
Any layout/move-out path constraint No
If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap.   
Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer.
    
Section 3. Tool Specific Information 
OEM  LAM
Tool Model  KIYO series (V2 platform)
Process  Poly
   
Software Version (include revision #) 1.8.4 SP11-HF5
System Power Rating  208 AC 3-Phase
Loading Configuration  3 Load ports
    
Tool under OEM service contract?    No
System Configuration   
Description   
Tool:   
RowParent CompntPart DescriptionDetailed Description
12300 SystemSystem TypeComplete System
22300 System2300 Version 2 (4 VPM)V2 platform supports up to 4 process chambers. 
32300 SystemWafer Size300 mm wafers
42300 SystemWafer ConfigSEMI
52300 SystemCassette Type25 Slot Cassette
62300 SystemProcess Module Position and Quantity2300 Versys Kiyo E Series (PM1,2,3,4)
72300 SystemGas Box TypeIGS Gas Box
82300 Process ModuleChamber TypeVersys Kiyo
92300 Versys Kiyo OptionsChamber PinnacleStandard Pinnacle (-814)
102300 Versys Kiyo OptionsWafer Clamping MechanismCenter RF, Tunable ESC (-374)
112300 Versys Kiyo OptionsRF StrapRF Coupling Strap
122300 Versys Kiyo OptionsRF Ground BracketStandard Fingers (-006)
132300 Versys Kiyo OptionsEdge RingQuartz (EBP)
142300 Versys Kiyo OptionsInjectorAlt 1 Injector (-026)
152300 Versys Kiyo OptionsInjector ShieldStandard Injector Shield
162300 Versys Kiyo OptionsPlasma ScreenEnhanced (-035)
172300 Versys Kiyo OptionsGas WeldmentOriginal (-103)
182300 Versys Kiyo OptionsESC Hose KitLow Temp
192300 Versys Kiyo OptionsESC Facility PlateCompression Facility Plate
202300 Versys Kiyo OptionsLinerACME Coated Universal (-838)
212300 Versys Kiyo OptionsChamber ManometerStandard
222300 Versys Kiyo OptionsWafer Lift MechanismPrime Movers
232300 Versys Kiyo OptionsVoltage Control Interface1200V
242300 Versys Kiyo OptionsO-ringsChemraz
252300 Versys Kiyo OptionsTCP CoilStandard
262300 Versys Kiyo OptionsTCP SourceDual 1500W
272300 Versys Kiyo Options300MM Turbo Pump2200 L/s BOCE (Seiko Seiki)
282300 Versys Kiyo OptionsHeated ForelineHeated
292300 Versys Kiyo OptionsHeated Foreline Clamp CoversYes
302300 Versys Kiyo OptionsEndpoint DetectionOES2
312300 Versys Kiyo OptionsChamber Viewport WindowStandard
322300 Versys Kiyo OptionsChamber Isolation ValveBarrier Seal Door
332300 Versys Kiyo OptionsVacuum ValveViton
342300 Versys Kiyo OptionsWater ControlPassive RF PCW Control
352300 Versys Kiyo OptionsService CoversStandard
362300 Versys Kiyo OptionsTCU to PM50ft (Default)
372300 Versys Kiyo OptionsPump to PM100ft
382300 Gas SystemFacilitizationNo Gas Interface Box
392300 Gas SystemFuture PMPosition 1, 2, 3, 4
402300 Gas SystemGas System ExhaustTop Exhaust
412300 Versys Kiyo Gas Box OptionsGas Line16 Gas Configuration
422300 Versys Kiyo Gas Box OptionsHeated Gas LinesHeated Lines, Pos 1 & 2
43Gas Box ConfigurationGas Line 1SiCL4 100 sccm - STEC Z313
44Gas Box ConfigurationGas Line 2CL2 500 sccm - STEC D213
45Gas Box ConfigurationGas Line 3HBr 500 sccm - STEC D213
46Gas Box ConfigurationGas Line 4CF4 400 sccm - STEC D213
47Gas Box ConfigurationGas Line 5O2 500 sccm -STEC D213
48Gas Box ConfigurationGas Line 6He 500 sccm - STEC Z313
49Gas Box ConfigurationGas Line 7CH2F2 200 sccm - STEC D213
50Gas Box ConfigurationGas Line 8Ar 1000 sccm - STEC D213
Gas Box ConfigurationGas Line 9HeO2 (30% O2) 50 sccm - STEC Z313
 Gas Box ConfigurationGas Line 10NF3 1000 sccm - STEC D213
Gas Box ConfigurationGas Line 11N2 (Process Grade) 250 sccm - STEC Z313
51Gas Box ConfigurationGas Line 12SO2 200 sccm - STEC Z313
52Gas Box ConfigurationGas Line 13NA
53Gas Box ConfigurationGas Line 14NA
54Gas Box ConfigurationGas Line 15NA
55Gas Box ConfigurationGas Line 16NA
56Gas Box ConfigurationGas Box Inlet OptionRegulated Inlet Gas Panel
572300e PlatformATM Front End Load Port3 FOUP BROOKS
582300e PlatformATM Cassette IDHermos Carrier ID
592300e PlatformATM, Factory AutomationOHT PIO Sensor
602300e PlatformATM Input Buffer Station25 Slot
612300e PlatformATM, CTC Computer, StorageHard Disk Drive - Mirrored
622301e PlatformVTM Loadlock AStandard
632302e PlatformVTM Loadlock BStandard
642300e PlatformSubpanelRPDB
652300e PlatformSignal TowerR-O-G-B Signal Tower
66Pre-FacilitiesPM Peripherals: Backing PumpsESR100WN
67Pre-FacilitiesRPDB: Backing Pump CB Sizes30A
682300 PeripheralsTCU ConfigYR-8020
69Pre-FacilitiesRPDB: TCU CB Sizes30A
70Line Item 21
Versys Kiyo Details
Critical PartsPCB,VIOP BOARD
71Line Item 21
Versys Kiyo Details
Critical PartsVME 7668A CPU board
72Line Item 21
Versys Kiyo Details
Critical PartsASSY,ENCL,DC CONT
73Line Item 21
Versys Kiyo Details
Critical PartsASSY,ENCL,AC,2300 PM
74Line Item 21
Versys Kiyo Details
Critical PartsWDO, GAS, INJ, F SEAL, QRTZ, NSG
75Line Item 22
Chamber Pinnacle Details
Critical PartsTop Chamber ACME Coated
76Line Item 23
Electrostatic Chuck Details
Critical PartsESC,TUNABLE,COUL,CNTR RF,300MM
77Line Item 23
Electrostatic Chuck Details
Critical PartsPCBA,ESC FILTER, BICEP Q
78Line Item 24
Bias Details
Critical PartsFRU,ASSY,BIAS MTCH,2300
79Line Item 24
Bias Details
Critical PartsCA,COAX,RF,HN-90,TO,HN-90,11FT
80Line Item 24
Bias Details
Critical PartsGEN,APEX,1.5KW,13.56MHz, F47,H,P4,-2000Hz
81Line Item 25
RF Strap Details
Critical PartsCOUPLER,RF,ESC,BIAS COAX FEED
82Line Item 26
RF Ground Bracket
Critical PartsBRKT,RF GND,BIAS ELECT ASSY
83Line Item 28
Injector Details
Critical PartsWDO, SAPPHIRE, 25MMX.087
84Line Item 29
Injector Shield Details
Critical PartsSLV,GND SHLD,TCP GAS INJ,NO Ni
85Line Item 30
Plasma Screen Details
Critical PartsSCRN,PLASMA,DUAL GAS ZONE.2300
86Line Item 31
Gas Weldment Details
Critical PartsGas Injector Weldment : Stainless
87Line Item 32
ESC Hose Kit Details
Critical PartsHOSE,DUAL INSUL,ESC TEMP CTRL,RET-SUP
88Line Item 34
Liner Details
Critical PartsLIN, 2300, UPR CHMB, COATED
(chamber liner)
89Line Item 34
Liner Details
Critical PartsLIN, MTG PL, ESC, 300MM
90Line Item 34
Liner Details
Critical PartsHSG,BIAS ELCTD,300MM (ESC toilet bowl)
91Line Item 35
Manometer Details
Critical PartsMNMTR,ETCH,100MT (MKS 100mT manometer)
92Line Item 35
Manometer Details
Critical PartsMNMTR,2STPT,100 DEG C,KF16,10T (MKS 10Torr manometer)
93Line Item 36
Wafer Lift Mechanism Details
Critical PartsPIN,FLEX,300MM PIN LFT,.042 (lift pins)
94Line Item 36
Wafer Lift Mechanism Details
Critical PartsFTG,TUBE,FIXED ORF,CHK VLV,AIR,SMC (pin speed mod)
95Line Item 36
Wafer Lift Mechanism Details
Critical PartsACTR,BLWS.PINLIFT,.395 STROKE,
96Line Item 37
Voltage Control Interface Details
Critical PartsASSY,VOLTAGE DETECTOR,ESC,2300
Z1SY,VOLTAGE/DET,ESC,2300,10-8
97Line Item 39
TCP Coil Details
Critical PartsASSY, S/G COIL, 1.5T OUT, 2T IN
98Line Item 40
TCP Source Details
Critical PartsGEN,APEX,1.5KW,13.56MHz, F47,H,P4+2000Hz
99Line Item 40
TCP Source Details
Critical PartsFRU,ASSY.ENCL.TCP MTCH,KIYO 23
100Line Item 40
TCP Source Details
Critical PartsCA,COAX,RF,HN-90,TO,HN-90,18FT
101Line Item 41
300MM Turbo Pump Details
Critical PartsPMP,TURBO,2.2K L/S,ISO 250-F,T
102Line Item 42
Heated Foreline Details
Critical PartsKIT,HEATERS,FORELINE, SEIKO 2200,IGS
103Line Item 44
Optical Endpoint Details
Critical PartsSPEC. OES2, ENDPOINT, VS70-S98
104Line Item 44
Optical Endpoint Details
Critical PartsWDO,QUARTZ
105Line Item 46
Chamber Isolation Valve Details
Critical PartsKIT,PM, VAT RKR VLV INSTALL
106Line Item 46
Chamber Isolation Valve Details
Critical PartsKIT,PM DR, VAT RCKR VLV,BARRIER
107Line Item 48
Lower Isolation Valve Details
Critical PartsGTV,CONT,250 MM FLG,SER 65,VAL
108Line Item 48
Lower Isolation Valve Details
Critical PartsO-RING, ARMOR CRYSTAL, 10.484 ID X .139W
109Line Item 74
Transducer Type Details
Critical PartsXDCR.PRESS,-15 TO 235 PSIG,T3,NO DISPLAY


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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