Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2015-01-05
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Missing or damaged parts: Fab15 confirmed there are no missing or damaged parts.
| OEM | LAM |
|---|---|
| Tool Model | Kiyo EX e6 |
| Software Version (include revision #) | 1.8.4_SP8-HF5 |
| System Power Rating | 200 AC 3-Phase |
| Loading Configuration | 4 load ports |
| Chamber Description | Chamber Chemicals Gases Used | |
|---|---|---|
| Chamber PM1 | Kiyo EX | SiCl4,BCl3,Cl2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,NF3,N2,SO2 |
| Chamber PM2 | Kiyo EX | SiCl4,BCl3,Cl2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,NF3,N2,SO2 |
| Chamber PM3 | Kiyo EX | SiCl4,BCl3,Cl2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,NF3,N2,SO2 |
| Chamber PM4 | Kiyo EX | SiCl4,BCl3,Cl2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,NF3,N2,SO2 |
| Chamber PM5 | Kiyo EX | SiCl4,BCl3,Cl2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,NF3,N2,SO2 |
| Chamber PM6 | None | None |
| Cable Description | Length | |
|---|---|---|
| 1 | AC RACK | 15000 |
| 2 | RPDB RACK | 15000 |
| 3 | RPP | 15000 |
| Optional Gas | Custom Gas Lines | TOR |
|---|---|---|
| Gas Line 1 | SiCL4(125) STEC Z719 | SiCl4 125 |
| Gas Line 2 | BCL3(300) STEC Z719 | BCl3 300 |
| Gas Line 3 | CL2(300) STEC D219 | CL2 300 |
| Gas Line 4 | HBr(500) STEC D219 | HBr 500 |
| Gas Line 5 | CF4(300) STEC D219 | CF4 300 |
| Gas Line 6 | O2(500) STEC D219 | O2 500 |
| Gas Line 7 | SF6(300) STEC D219 | SF6 300 |
| Gas Line 8 | He(500) STEC D219 | He 500 |
| Gas Line 9 | C4F6(200) STEC D219 | C4F6 200 |
| Gas Line 10 | CH2F2 150 | |
| Gas Line 11 | Ar 600 | |
| Gas Line 12 | O2 20 | |
| Gas Line 13 | NF3 600 | |
| Gas Line 14 | N2 250 | |
| Gas Line 15 | SO2 300 | |
| Gas Line 16 | NA | |
| Side He Ballast | He 300 | |
| Tuning Gas 1 | C4F6 200 |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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