Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials (AMAT) Centura 4.0 Radiance RTP

Asset ID: 52664

Print spec sheet

Applied Materials (AMAT)

Centura 4.0 Radiance RTP

Platform RTP Equipment

Rapid Thermal Processing (RTP) Equipment

Equipment details:

Date of Manufacture: 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed by the OEM and their certified third party together, and is currently located in on-site storage area within Fab15.
Shipping brackets and kits will need to be supplied by buyer.

All chambers are seen in a picture but Chamber D has been removed from tool.

[Chamber A]
RTP Std Radiance chamber
lamp HTR
N2;PRCS/BTM/MAGLEV :50/50/100slm
O2;PRCS 50/1slm, He;5slm

[Chamber B]
RTP Std Radiance chamber
lamp HTR
N2;PRCS/BTM/MAGLEV :50/50/100slm
O2;PRCS 50/1slm, He;5slm

Chamber D has been removed.

Missing or damaged parts as August 7, 2018
Item No. / Description / Parts No. / Missing or Broken / Dismounted Date
1.  Ch-A Slit Assy  /  0010-03057  /  Damaged  /  2018/8/8
2.  Ch-B Slit Assy  /  0010-03057  /  Damaged  /  2018/8/8
3.  Trance  /  N/A  /  Missing  /  2018/8/10
4.  Trance  /  N/A  /  Missing  /  2018/8/10

 

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.