Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Producer GT3 PECVD TEOS

Asset ID: 210952

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Applied Materials (AMAT)

Producer GT3 PECVD TEOS

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Tool Model: Producer GT3

Process: TEOS

Segregation Requirement: Non Metal

Software Version (include revision #): pmB5.4_135

System Power Rating: 208 AC 3-Phase

Loading Configuration: 4 SELOP 7 25 WAFER FOUP (LOADPORT)


Chm/Unit Position 1: PE TEOS GT TWIN CHM A; Chemicals / Gases Used: O2, NF3, AR, TEOS*2, HE_TEOS

Chm/Unit Position 2: PE TEOS GT TWIN CHM A; Chemicals / Gases Used: O2, NF3, AR, TEOS*2, HE_TEOS

Chm/Unit Position 3: PE TEOS GT TWIN CHM A; Chemicals / Gases Used: O2, NF3, AR, TEOS*2, HE_TEOS


Technology: DCVD

Platform Type: Producer GT3


System Software

System software: B5.4_135

FiCGUI: fB5.20_11

GP: 8.10.21.2

DTauMacros: 9.2.44.0


Mainframe Configuration 

Robot type: FX

Robot Blades: 0200-08346

LL preheater: 0090-04659

slit valve door: 9992-00594

MF pump: Ebara ESR80WN

LL pump: EPX 180 TWIN DRY VACCUM PUMP 3620-00517

Diffuser: 0190-37371


Chamber Configuration 

Chamber Type: PE Silane

RF Generator 1 (HF): 0920-00139

RF Generator 2 (LF): 0190-08677

Heater: 0010-36734

Slit Valve: 9992-00594

Rf Filter: 0010-42371

Foreline TV: 0190-32100

Foreline ISO: 3870-06775

Gas box: 0040-53688

FACEPLATE: 0040-95475

BLOCKER: 0021-26544

PUMPING LINER side1: 0200-02407

PUMPING LINER side2: 0200-02408

LINER CERAMIC TOP: 0200-06758

LINER CERAMIC MIDDLE: 0200-02973

LINER CERAMIC BOTTOM: 0200-02974

CERAMIC ISOLATOR: 0021-27290

LIFT PINS, FLOATING(BIG FOOT): 0200-03314

LIFT HOOP: 0200-03312

Spacer Side 1: 0021-24181

Spacer Side 2: 0021-24182

RPS: 0190-40602


Gas Box Configuration

Line 1: - EMPTY -

Line 2: - EMPTY -

Line 3: TEOS_1 - 7000

Line 4: TEOS_2 - 7000

Line 5: - EMPTY -

Line 6: NF3 - 5000

Line 7: - EMPTY -

Line 8: AR - 10000

Line 9: HE_TEOS - 15000

Line 10: - EMPTY -

Line 11: - EMPTY -

Line 12: O2 - 15000

Line 13: - EMPTY -

Line 14: - EMPTY -

Line 15: - EMPTY -

Line 16: - EMPTY -

Line 17: - EMPTY -

Line 18: Purge02

Line 19: Purge03

Line 20: - EMPTY -

Line 21: - EMPTY -

Line 22: - EMPTY -


Process Pump/Abatement 

Pump: KASHIYAMA SDE1203B


Liquid line temp. 

TEOS_1 injection temp.: 150

TEOS_2 injection temp.: 150

Heated line2: 120

Heated line3: 120

Heated line4: 120

Heated line5: 120

Heated line6: 120

Heated line7: 120


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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