Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

KLA-Tencor Corp. Archer 300+

Asset ID: 205548

Print spec sheet

KLA-Tencor Corp.

Archer 300+

Overlay Measurement System

Metrology Equipment

Equipment details:

Date of Manufacture: 2012

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Section 1. Tool General Information 
Micron MISTI/LID #  KA3PB7V400
Vendor Tool Serial #  6032336
Month / Year of Tool Move In  5-Aug-12
Tool Availability Date  12/1/2019
Tool Current Status De-installed
Tool working condition  Working
Tool Location  Warehouse
Any modification/conversion/refrofit was perform to the tool? No
    
Section 2. Move-out constraint  
Any layout/move-out path constraint No
If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap.   
Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer.
    
Section 3. Tool Specific Information 
OEM  KLA
Tool Model  ARCHER 300+ AIM
Process  Registration
   
Software Version (include revision #) 14.00.05.20200
System Power Rating  208V3W-N
Loading Configuration   
    
Tool under OEM service contract?    No
System Configuration
Description
Tool:
Process Unit:
Controller:
MFC/Pressure Unit:
Drive Mechanisms:
FOUP Opener:
Gas System:
Exhuast System:
Section 4. Missing/Defective/Cannibalized Parts  
     
     
DescriptionMissing (Qty)Defective (Qty)
XYT Stage 1
Robot controller 1
Screen monitor 1
CPU fan in FEC computer1 
FFU2 1
FFU3 1


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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