Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

LAM Research TCP 9600SE

Asset ID: 215020

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LAM Research

TCP 9600SE

Metal Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 200mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hsinchu 300, Taiwan

Available date: Currently Available

HARD DRIVE WILL BE REFORMATTED. OPERATING SOFTWARE IS NOT INCLUDED.

Inspect to confirm configuration and condition and missing and damaged parts.

Install Type:Stand Alone

Software Type:Lam Classic  

Software Version:E40 9600

Is System On-Line? No

CE Mark Certified? Yes  

SECS Interface:Yes 

OEM Audit Available? Yes  

Decontamination Report Exists? No

Can Produce Wafers AS IS? No

Any Known Field Modifications? Yes  

All Cables Present? No

Gas Panel Type:Standard 

Etcher Mainframe Type:Stand Alone

Directory of Etch Chamber/System Types:Process

9600, 9600SE, 9600SE II, 9600PTX, 9600DFM: Metal Etch

Microwave Strip, DSQ, PLL:DSQ

Key Common Options:Included?

Signal Lamp Tower:Yes  

Bolt-On-SMIF:No

Built-In SMIF:No

Clean Room Manuals:No

Standard Manuals:No

Remote Operator Interface:No

Key Stand Alone Mainframe Items

Equipe Autoloader:Yes  

Built-In Hepa Filter:No

Orbitally Welded Gas Box:No

Backside Helium Cooling Yes  

  Helium Cooling MFC Type:622A-13224

Heated Pumping Manifolds:No

On-Board RF Generators:Yes 

Remote RF Cart:No

Remote Gas Box:No

Main On-Board AC Distribution Type:Circuit Breaker

Remote AC Box:Yes  

WVDS :Yes 

Hine 38A Indexers:No

Endpoint Detection System:Yes  

Endpoint Type:Photodiode

Chamber Liner Present:No

Electrode Gap:Fixed Gap

Wafer Clamp:ESC 

TCP Coil Size:8”  

Key Alliance Mainframe Items

Robot Type:Autoloader

Entrance/Exit or Loadlock Pump

Manufacturer:IQ80

Model:EWARD

Not Included With System

Main Etch Chamber Pump

Manufacturer:EWARD

Model:IQ80/500

Quantity Required:1 

Not Included With System

Strip/Ash Chamber Pump 

Manufacturer:EWARD

Model:IQ80/500

Quantity Required:1  

Not Included With System

Roughing Pump

System Requires #3 Pump:No

Not Included With System

Chiller Information

Manufacturer:TAITAC

Model:DEX-30A

Electrical Requirements

# of Cooling Channels:One  

Quantity Required:1 

Not Included With System

Gas Box Configuration

Maximum Number of Gas Lines:Standard (8)  

​Gas Line # Gas Flow (sccm)

1 CL2 200

2 BCL3 100

3 SF6 100

4 N2 20

5 N2 500

6 AR 200

7 O2 2000

8 CF4 200


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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