Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC

Rudolph Technologies, Inc. Matrix S-300

Asset ID: 210188

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Rudolph Technologies, Inc.

Matrix S-300

Ellipsometer

Metrology Equipment

Equipment details:

Date of Manufacture: 11/2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available



Inspect to confirm configuration and condition.

 

General System Info

Date of Audit: 14-Feb-22

Serial Number: 1-05-VSD-1341-BR-06

Original Ship Date: 2003

Wafer Size (inches): 12

Loading Configuration: FOUP

Operating System Software Version: OS2

Rudolph Software Version: 7.51

User ID: RTIENG

Login: RUDENG

Date of Last PM: 2018

CE Mark Certified? No

Electrical Requirements: 200/220V Single phase

OEM Audit Available? No

Can Produce Wafers AS IS? No

Any Known Field Modifications? No

All Cables Present? No

Shipping Brackets Installed upon Deinstall: No

GEM/SECS Interface: Yes

3.5” Floppy Drive: Yes

Hard Disk Size: unknown

 

System Configuration

Matrix Series: S-300

 

Key Common Options

Clean Room Manuals: No

Standard Manuals: No

CD-ROM Manuals: No

Calibration Standards: No

 

Matrix Series

Loading Configuration: Dual FOUP

Lasers: 633nm HeNe / 458nm Ar / 780/905nm Solid State

Operating Wavelengths:

DUV: 190-470nm

OMA: 470-905nm

Pattern Recognition Hardware: No

 

COGNEX Type

Spot Optic Sizes (um): 100,30,15

 

Damage/Missing parts list

Please inspect tool to reconfirm

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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